High resolution optical and electron beam patterning processes with new ionic liquid based resists
2019/35/B/ST8/03736
Keywords
Descriptors
- ST8_001: Inżynieria chemiczna, chemia techniczna, inżynieria środowiska, inżynieria sanitarna, inżynieria procesowa
Panel
ST8 – Production and processes engineering: modelling, product design, process design and control, construction methods and engineering, power units and systems
Host institution
Instytut Technologii Materiałów Elektronicznych
Voivodeship: mazowieckie
Principal investigator (from the host institution)
dr Katarzyna Małgorzata Komorowska
Number of co-investigators in the project: 9
Call
OPUS 18 – announced on 2019-09-16
- Amount awarded
- 1 351 320 PLN
- Project start date
- 2020-08-27
- Project end date
- 2023-05-26
- Project duration
- 33 months (the same as in the proposal)
- Project status
- Project settled
Project description
Download the project description in a pdf file
Note — project descriptions were prepared by the authors of the applications themselves and placed in the system in an unchanged form.
Information in the final report
Publication in academic press/journals (6)
-
Interaction of electron beam with ionic liquids and its application for micropatterning
- Authors:
- Krzysztof Rola, Adrian Zając, Andrea Szpecht, Dominik Kowal, Janna Cybinska, Marcin Śmiglak
- Academic press:
- European Polymer Journal (year: 2021, volume: 5, pages: 110615/1-110615/12), Publisher: Elsevier
- Status:
- Published
- DOI:
- 10.1016/j.eurpolymj.2021.110615 – link to the publication
-
Synthesis and Behavior of Hexamethylenetetramine-Based Ionic Liquids as an Active Ingredient in Latent Curing Formulations with Ethylene Glycol for DGEBA
- Authors:
- Dawid Zieliński, Andrea Szpecht, Paulina Hinc, Marcin Śmiglak
- Academic press:
- Molecules (year: 2023, volume: 28, pages: 892), Publisher: MDPI
- Status:
- Published
- DOI:
- 10.3390/molecules28020892 – link to the publication
-
Mono N‐Alkylated DABCO-Based Ionic Liquids and Their Application as Latent Curing Agents for Epoxy Resins
- Authors:
- Dawid Zielinski, Andrea Szpecht, Paulina Hinc, Hieronim Maciejewski, and Marcin Smiglak
- Academic press:
- ACS Applied Polymer Materials (year: 2021, volume: 3, pages: 5481-5493), Publisher: ACS Publications
- Status:
- Published
- DOI:
- 10.1021/acsapm.1c00777 – link to the publication
-
Grism fabricated on the end-face of an optical fiber
- Authors:
- Piotr Pala, Katarzyna Komorowska, Andrea Szpecht, Tadeusz Martynkien
- Academic press:
- Optics Express (year: 2023, volume: 31, pages: 23362-23371), Publisher: Optica Publishing Group
- Status:
- Published
- DOI:
- 10.1364/OE.491386 – link to the publication
-
Optical Fiber Grating-Prism Fabrication by Imprint Patterning of Ionic-Liquid-Based Resist
- Authors:
- Natalia Turek, Piotr Pala, Andrea Szpecht, Adrian Zając, Teresa Sembratowicz, Tadeusz Martynkien, Marcin Śmiglak, K. Komorowska
- Academic press:
- International Journal of Molecular Sciences (year: 2023, volume: 24, pages: 1370), Publisher: MDPI
- Status:
- Published
- DOI:
- 10.3390/ijms24021370 – link to the publication
-
Thermal and Electrochemical Properties of Ionic Liquids Bearing Allyl Group with Sulfonate-Based Anions—Application Potential in Epoxy Resin Curing Process
- Authors:
- Andrea Szpecht, Dawid Zieliński, Maciej Galiński, Marcin Śmiglak
- Academic press:
- Molecules (year: 2023, volume: 28, pages: 709), Publisher: MDPI
- Status:
- Published
- DOI:
- 10.3390/molecules28020709 – link to the publication
Articles in post-conference publications (1)
-
Electron beam and optical patterning of polymerizable ionic liquid-based resists
- Authors:
- Natalia Turek, Andrea Szpecht, Aleksandra Szymańska, Tomasz Stefaniuk, Katarzyna Komorowska
- Conference:
- Advances in Patterning Materials and Processes XL (year: 2023, volume: SPIE: Advanced Lithography and Patterning, pages: 124981S-1 - 124981S-5), Publisher: SPIE Proceedings
- Date:
- conference 26.02-02.03.2023
- Status:
- Published
- DOI:
- 10.1117/12.2658445 – link to the publication