Projects funded by the NCN
GaN nanostructures genereted in selective ICP etching process, initied by titanium thin film
2013/11/N/ST7/02801
Keywords:
Descriptors:
- ST7_5: Micro- and nanelectronic, optoelectronic and photonic components
Panel:
ST7 - Systems and communication engineering: electronics, communication, optoelectronics
Host institution :
Instytut Technologii Elektronowej
woj. mazowieckie
Principal investigator (from the host institution):
Number of co-investigators in the project: 3
Call: PRELUDIUM 6 - announced on 2013-09-16
Amount awarded: 149 723 PLN
Project start date (Y-m-d): 2014-07-15
Project end date (Y-m-d): 2017-07-14
Project duration:: 36 months (the same as in the proposal)
Project status: Project settled
Information in the final report
- Publication in academic press/journals (1)
- Articles in post-conference publications (2)
- Implementation of the inductively coupled plasma etching processes for forming gallium nitride nanorods used in ultraviolet light-emitting diode technologyAuthors:Marek Ekielski, Marek Wzorek, Krystyna Gołaszewska, Alina Domanowska, Andrzej Taube, Mariusz SochackiAcademic press:Journal of Vaccum Science & Technology B (rok: 2020, tom: 38, strony: ), Wydawca: AIP PublishingStatus:Accepted for publicationDOI:10.1116/6.0000133 - link to the publication
- High aspect ratio GaN nanorods fabricated by means of UV photolithography and ICP etchingAuthors:Marek Ekielski, Marek Wzorek, Michał A. Borysiewicz, Alina Domanowska, Tomasz Wojtowicz, Anna Piotrowska and Eliana KamińskaConference:International Microprocesses and Nanotechnology Conference (MNC 2016) (rok: 2016, ), Wydawca: Japan Society of Application PhysicsData:konferencja 08 - 11 listopadStatus:Published
- Novel approach of top-down GaN nanorods fabricationAuthors:Marek Ekielski, Marek Wzorek, Marcin Juchniewicz, Eliana Kamińska, Anna PiotrowskaConference:15th INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (rok: 2015, ), Wydawca: IEEEData:konferencja 27-30 LipiecStatus:Published