Projects funded by the NCN

Information on the principal investigator and host institution

Information of the project and the call

Keywords

Equipment

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Miniature MEMS-type transmission electron microscope

2016/21/B/ST7/02216

Keywords:

microscopy field emission source vacuum micropump MEMS

Descriptors:

  • ST7_5: Micro- and nanelectronic, optoelectronic and photonic components

Panel:

ST7 - Systems and communication engineering: electronics, communication, optoelectronics

Host institution :

Politechnika Wrocławska

woj. dolnośląskie

Other projects carried out by the institution 

Principal investigator (from the host institution):

prof. Anna Górecka-Drzazga 

Number of co-investigators in the project: 4

Call: OPUS 11 - announced on 2016-03-15

Amount awarded: 1 055 950 PLN

Project start date (Y-m-d): 2017-02-23

Project end date (Y-m-d): 2020-02-22

Project duration:: 36 months (the same as in the proposal)

Project status: Project settled

Project description

Download the project description in a pdf file

Note - project descriptions were prepared by the authors of the applications themselves and placed in the system in an unchanged form.

Equipment purchased [PL]

  1. Kompaktowy mikroskop elektronowy skaningowy JEOL JSM-IT100 lub podobnej klasy; szt. 1, koszt 300000 zł.
  2. System elektrycznych i przepływowych przepustów do mikroskopu (20 000 PLN)
  3. Mikroskop kompaktowy HITACHI TM-3030 PLUS lub podobnej klasy (280 000 PLN)

Information in the final report

  • Publication in academic press/journals (11)
  • Articles in post-conference publications (14)
  • Book publications / chapters in book publications (1)
  1. Preliminary research on imaging in MEMS electron microscope
    Authors:
    M. Krysztof, T. Grzebyk, A. Górecka-Drzazga
    Academic press:
    Measurement Science and Technology (rok: 2020, tom: 31, strony: 035401 1-7), Wydawca: IOP Publishing
    Status:
    Published
    DOI:
    10.1088/1361-6501/ab572a - link to the publication
  2. MEMS ion source for ion mobility spectrometry
    Authors:
    T. Grzebyk, P. Szyszka, M. Krysztof, A. Górecka-Drzazga, J. Dziuban
    Academic press:
    Journal of Vacuum Science Technology (rok: 2019, tom: 37, strony: 022201 1-6), Wydawca: American Vacuum Society
    Status:
    Published
    DOI:
    10.1116/1.5068750 - link to the publication
  3. Fabrication and characterization of a miniaturezed octupole deflection system for MEMS electrone microscope
    Authors:
    M. Krysztof, M. Białas, P. szyszka, T. Grzebyk, A. Górecka-Drzazga
    Academic press:
    Ultramicroscopy (rok: 2021, tom: 225, strony: 113288), Wydawca: Elsevier
    Status:
    Published
    DOI:
    10.1016/j.ultramic.2021.113288 - link to the publication
  4. Characterization of the ionization process inside a miniature glow-discharge micropump
    Authors:
    T. Grzebyk, A. Górecka-Drzazga
    Academic press:
    Bulletin of The Polish Academy of Sciences Technical Sciences (rok: 2018, tom: 66, strony: 173-178), Wydawca: Polish Academy of Sciences
    Status:
    Published
    DOI:
    10.24425/122097 - link to the publication
  5. Electron beam source for the miniaturized electron microscope on-chip
    Authors:
    K.Laszczyk, M. Krysztof
    Academic press:
    Vacuum (rok: 2021, tom: 189, strony: 110236), Wydawca: Elsevier
    Status:
    Published
    DOI:
    10.1016/j.vacuum.2021.110236 - link to the publication
  6. Electron optics column for a new MEMS-type transmission electron microscope
    Authors:
    M. Krysztof, T. Grzebyk, A. Górecka-Drzazga, K. Adamski, J. Dziuban
    Academic press:
    Bulletin of the Polish Academy of Sciences Technical Sciences (rok: 2018, tom: 66, strony: 133-137), Wydawca: Polish Academy of Sciences
    Status:
    Published
    DOI:
    10.24425/119067 - link to the publication
  7. Field emission cathodes to form an electron beam prepared from carbon nanotube suspensions
    Authors:
    Karolina U. Laszczyk
    Academic press:
    Micromachines (rok: 2020, tom: 11, strony: 260, 1-31), Wydawca: MDPI- Publisher of Open Access Journals
    Status:
    Published
    DOI:
    10.3390/mi11030260 - link to the publication
  8. Improved properties of the MEMS-type ion-sorption micropump
    Authors:
    T. Grzebyk, A. Górecka-Drzazga, J. Dziuban
    Academic press:
    Journal of Vacuum Science and Technology B (rok: 2017, tom: 35, strony: 0620011-6), Wydawca: American Vacuum Society
    Status:
    Published
    DOI:
    10.1116/1.4994782 - link to the publication
  9. MEMS tandem ion-sorption micropump
    Authors:
    T. Grzebyk
    Academic press:
    Journal of Micromechanics and Microengineering (rok: 2017, tom: 27, strony: 125019 (6 pp)), Wydawca: IOP Publishing
    Status:
    Published
    DOI:
    10.1088/1361-6439/aa9555 - link to the publication
  10. Technology and parameters of thin membrane-anode for MEMS transmission electron microscope
    Authors:
    M. Krysztof, T. Grzebyk, P. Szyszka, K. Laszczyk, A. Górecka-Drzazga, J. Dziuban
    Academic press:
    Journal of Vacuum Science and Technology B (rok: 2018, tom: 36, strony: 02C107-1-6), Wydawca: American Vacuum Society
    Status:
    Published
    DOI:
    10.1116/1.5006151 - link to the publication
  11. Magnetron-like miniature ion source
    Authors:
    T. Grzebyk, P. Szyszka, A. Górecka-Drzazga
    Academic press:
    Vacuum (rok: 2018, tom: 151, strony: 167-174), Wydawca: Elsevier Ltd.
    Status:
    Published
    DOI:
    10.1016/j.vacuum.2018.01.048 - link to the publication
  1. Electrical properties of carbon-black, graphite- and graphene-glass composites
    Authors:
    T. Matusiak, A. Dąbrowski, K. Laszczyk, L. Golonka
    Conference:
    13th Conference "Electron Technology" ELTE and 43rd International Microelectronics and Packaging IMAPS Poland Conference (rok: 2019, ), Wydawca: International Microelectronics and Packaging Society Poland Chapter
    Data:
    konferencja 4-6 September 2019
    Status:
    Published
  2. Electron transparent anode for MEMS transmission electron microscope
    Authors:
    M. Krysztof, T. Grzebyk, P. Szyszka, A. Górecka-Drzazga, J. Dziuban
    Conference:
    2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors (COE2018) (rok: 2018, ), Wydawca: IEEE
    Data:
    konferencja 18-20 June 2018 Warszawa
    Status:
    Published
  3. Field emission CNT electron source in a triode configuration for the purpose of the MEMS Transmission Electron Microscope
    Authors:
    K. Laszczyk, M. Krysztof, A. Herman, A. Górecka-Drzazga
    Conference:
    13th Conference "Electron Technology" ELTE and 43rd International Microelectronics and Packaging IMAPS Poland Conference (rok: 2019, ), Wydawca: International Microelectronics and Packaging Society Poland Chapter
    Data:
    konferencja 4-6 September 2019
    Status:
    Published
  4. Microfluidic device for biological samples imaging with use of a miniature MEMS transmission electron microscope
    Authors:
    M. Krysztof, M. Białas, A. Górecka-Drzazga
    Conference:
    23rd International Conference on Miniaturized Systems for chemistry and Life Sciences (microTAS 2019) (rok: 2019, ), Wydawca: The Chemical and Biological Microsystems Society
    Data:
    konferencja 27-31 October 2019
    Status:
    Published
  5. Transmission electron microscope on-the-chip - a reality or mystification?
    Authors:
    M. Krysztof, T. Grzebyk, A. Górecka-Drzazga, J. Dziuban
    Conference:
    2018 Baltic URSI Symposium (rok: 2018, ), Wydawca: IEEE
    Data:
    konferencja 15-17 May 2018
    Status:
    Published
  6. MEMS ion source for ion mobility spectrometry
    Authors:
    T. Grzebyk, P. Szyszka, M. Krysztof, A. Górecka-Drzazga, J.A. Dziuban
    Conference:
    31st International Vacuum Nanoelectronics Conference IVNC 2018 (rok: 2018, ), Wydawca: IEEE
    Data:
    konferencja 9-13 July 2018 Kyoto
    Status:
    Published
  7. Mikrosystemy wysokopróżniowe
    Authors:
    T. Grzebyk
    Conference:
    13th conference Electron Technology ELTE and 43rd International Microelectronics and Packaging IMAPS Poland Conference (rok: 2019, ), Wydawca: International Microelectronics and Packaging Society Poland Chapter
    Data:
    konferencja 4-6 September 2019
    Status:
    Published
  8. Design and testing of an Einzel lens for MEMS transmission electron microscope
    Authors:
    M. Krysztof, M. Białas, A. Górecka-Drzazga
    Conference:
    13th Conference "Electron Technology" ELTE and 43rd International Microelectronics and Packaging IMAPS Poland Conference (rok: 2019, ), Wydawca: International Microelectronics and Packaging Society Poland Chapter
    Data:
    konferencja 4-6 September 2019
    Status:
    Published
  9. From a microtip to a planar cathode - an electron source with a simplified technology
    Authors:
    K. Laszczyk, M. Krysztof, T. Grzebyk, P. Szyszka, J. Dziuban, A. Górecka-Drzazga
    Conference:
    2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors (COE2018) (rok: 2018, ), Wydawca: IEEE
    Data:
    konferencja 18-20 June 2018 Warszawa
    Status:
    Published
  10. High vacuum in MEMS
    Authors:
    T. Grzebyk, A. Górecka-Drzazga
    Conference:
    2018 Baltic URSI Symposium (rok: 2018, ), Wydawca: IEEE
    Data:
    konferencja 15-17 May 2018
    Status:
    Published
  11. Influence of a magnetic field on trajectories of electrons in MEMS transmission electron microscope
    Authors:
    T. Grzebyk, P. Szyszka, M. Krysztof, A. Górecka-Drzazga, J. A. Dziuban
    Conference:
    30th International Vacuum Nanoelectronics Conference IVNC 2017 (rok: 2017, ), Wydawca: IEEE
    Data:
    konferencja 10 - 14 July 2017
    Status:
    Published
  12. Preliminary imaging in miniature MEMS electron microscope
    Authors:
    M. Krysztof, T. Grzebyk, A. Górecka-Drzzazga, J. Dziuban
    Conference:
    31st International Vacuum Nanoelectronics Conference IVNC 2018 (rok: 2018, ), Wydawca: IEEE
    Data:
    konferencja 9-13 July 2018 Kyoto
    Status:
    Published
  13. Technology and properties of thin membrane-anode for MEMS transmission electron microscope
    Authors:
    M. Krysztof, T. Grzebyk, K. Laszczyk, A. Górecka-Drzazga, J. Dziuban
    Conference:
    30th Vacuum Nanoelectronics Conference IVNC 2017 (rok: 2017, ), Wydawca: IEEE
    Data:
    konferencja 10 -14 July 2017
    Status:
    Published
  14. The stable and long lifetime planar field emission cathode made of a CNT ink
    Authors:
    K. Laszczyk, M. Krysztof, J.A. Dziuban, A. Górecka-Drzazga
    Conference:
    31st International Vacuum Nanoelectronics Conference IVNC 2018 (rok: 2018, ), Wydawca: IEEE
    Data:
    konferencja 9-13 July 2018 Kyoto
    Status:
    Published
  1. Measurements of vacuum in microsystems
    Authors:
    A. Górecka-Drzazga, T. Grzebyk
    Book:
    Advances in Sensors (rok: 2018, tom: 5, strony: 281-307), Wydawca: International Frequency Sensor Association Publishing IFSA
    Status:
    Published

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