Displacement metrology of nano-electro-mechanical systems (NEMS) based on scanning tunneling microscopy methods
2016/21/N/ST7/02275
Keywords
Descriptors
- ST7_2: Elektrotechnika, elektronika: półprzewodniki, elementy i układy, systemy
- ST7_5: Mikro- i nanoelektronika, optoelektronika
Panel
ST7 – Systems and communication engineering: electronics, communication, optoelectronics
Host institution
Politechnika Wrocławska, Wydział Elektroniki Mikrosystemów i Fotoniki
Voivodeship: dolnośląskie
Principal investigator (from the host institution)
Number of co-investigators in the project: 2
Call
PRELUDIUM 11 – announced on 2016-03-15
- Amount awarded
- 99 000 PLN
- Project start date
- 2017-03-15
- Project end date
- 2019-09-14
- Project duration
- 30 months (the same as in the proposal)
- Project status
- Project settled
Project description
Download the project description in a pdf file
Note — project descriptions were prepared by the authors of the applications themselves and placed in the system in an unchanged form.
Equipment purchased [PL]
- Precyzyjny aktuator liniowy do zastosowań próżniowych ze sterownikiem. Cost: 9 000 PLN
- Próżniomierz dwuzakresowy. Cost: 6 000 PLN
Information in the final report
Publication in academic press/journals (2)
-
ARMScope – THE VERSATILE PLATFORM FOR SCANNING PROBE MICROSCOPY SYSTEMS
- Authors:
- Bartosz Świadkowski, Tomasz Piasecki, Maciej Rudek, Michał Świątkowski, Krzysztof Gajewski, Wojciech Majstrzyk, Michał Babij, Andrzej Dzierka, Teodor Gotszalk
- Academic press:
- METROLOGY AND MEASUREMENT SYSTEMS (year: 2020, volume: 27, pages: 119–130), Publisher: METROLOGY AND MEASUREMENT SYSTEMS
- Status:
- Published
- DOI:
- 10.24425/mms.2020.131711 – link to the publication
-
Resolution improvement in electromagnetically actuated Wheatstone bridge configuration micromechanical resonators
- Authors:
- Magdalena Moczała, Andrzej Sierakowski, Michał Babij, Krzysztof Kwoka, Rafał Dobrowolski, Jacek Radojewski, Tomasz Piasecki, Teodor Gotszalk
- Academic press:
- Sensors and Actuators A: Physical (year: 2018, volume: vol. 284, pages: 181-185), Publisher: Sensors and Actuators. A, Physical
- Status:
- Published
- DOI:
- 10.1016/j.sna.2018.10.028 – link to the publication