Study of phenomena at the metal-semiconductor interface in semiconductor devices based on AlGaN/GaN heterostructures

2012/07/D/ST7/02583

Keywords

Descriptors

  • ST7_5: Mikro- i nanoelektronika, optoelektronika

Panel

ST7 – Systems and communication engineering: electronics, communication, optoelectronics

Host institution

Politechnika Wrocławska, Wydział Elektroniki Mikrosystemów i Fotoniki

Voivodeship: dolnośląskie

Other projects carried out by the institution »

Principal investigator (from the host institution)

dr Wojciech Piotr Macherzyński

Number of co-investigators in the project: 5

Call

SONATA 4 – announced on 2012-09-15

Amount awarded
440 374 PLN
Project start date
2013-07-17
Project end date
2016-11-16
Project duration
40 months (the same as in the proposal)
Project status
Project settled

Equipment purchased [PL]

  1. Pompa typu sorpcyjnego. Cost: 68 374 PLN

Information in the final report

Publication in academic press/journals (12)

  1. Stress control by micropits density variation in strained AlGaN/GaN/SiN/AlN/Si(111) heterostructures

    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Serafińczuk Jarosław, Drzik Milan*, Paszkiewicz Regina
    Academic press:
    Crystal Research and Technology (year: 2016, volume: 51, pages: 225-230), Publisher: John Wiley and Sons Inc.
    Status:
    Published
    DOI:
    10.1002/crat.201500276 – link to the publication
  2. Surface topography analysis with application of roughness area dependence method

    Authors:
    Szyszka Adam, Wośko Mateusz M, Szymański Tomasz, Paszkiewicz Regina
    Academic press:
    Ultramicroscopy (year: 2016, volume: 170, pages: s. 77-85), Publisher: Elsevier
    Status:
    Published
    DOI:
    10.1016/j.ultramic.2016.07.017 – link to the publication
  3. The Meyer–Neldel rule in conduction mechanism of the electrospun ZnO nanofibers

    Authors:
    Stafiniak Andrzej P, Tłaczała Marek
    Academic press:
    NANO: Brief Reports and Reviews (year: 2016, volume: 11, pages: 1650025-1 - 1650025-5), Publisher: World Scientific Publishing Co. Pte Ltd
    Status:
    Published
    DOI:
    10.1142/S1793292016500259 – link to the publication
  4. Black phosphorus saturable absorber for ultrashort pulse generation

    Authors:
    J. Sotor, G. Soboń, W. Macherzyński, P. Paletko, K. M. Abramski
    Academic press:
    Applied Physics Letters (year: 2015, volume: 107, pages: 051108-1, 051108-1), Publisher: American Institute of Physics Publishing
    Status:
    Published
    DOI:
    10.1063/1.4927673 – link to the publication
  5. CORRELATION OF SELECTED PROBLEMS DURING GaN MOVPE EPITAXY ON Si SUBSTRATES WITH IN–SITU INTERFEROMETER OBSERVATION

    Authors:
    Tomasz Szymański, Mateusz Wośko, Bogdan Paszkiewicz, Kornelia Indykiewicz, Regina Paszkiewicz
    Academic press:
    Journal of ELECTRICAL ENGINEERING (year: 2014, volume: 65, pages: 294-298), Publisher: Slovenska Technicka Univerzita
    Status:
    Published
    DOI:
    10.2478/jee-2014-0047 – link to the publication
  6. GaN/AlN superlattice high electronmobility transistor heterostructureson GaN/Si(111)

    Authors:
    Mateusz Wośko, Bogdan Paszkiewicz, Andrej Vincze, Tomasz Szymański, Regina Paszkiewicz
    Academic press:
    Phys. Status Solidi B (year: 2015, volume: 252, pages: 1195– 1200), Publisher: Wiley-VCH Verlag
    Status:
    Published
    DOI:
    10.1002/pssb.201451596 – link to the publication
  7. Optimization of AlGaN/GaN/Si(111) buffer growth conditions for nitride based HEMTs on silicon substrates

    Authors:
    Mateusz Wośko, Bogdan Paszkiewicz, Tomasz Szymański, Regina Paszkiewicz
    Academic press:
    Journal of Crystal Growth (year: 2015, volume: 414, pages: 248-253), Publisher: Elsevier
    Status:
    Published
    DOI:
    10.1016/j.jcrysgro.2014.10.048 – link to the publication
  8. Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application

    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina, Drzik Milan
    Academic press:
    Journal of Vacuum Science & Technology A (year: 2015, volume: 33, pages: 46029), Publisher: AVS Science and Technology Society
    Status:
    Published
    DOI:
    10.1116/1.4921581 – link to the publication
  9. Electrical conduction of a single electrospun ZnO nanofiber

    Authors:
    Stafiniak Andrzej P, Boratyński Bogusław, Baranowska-Korczyc Anna*, Fronc Krzysztof*, Elbaum Danek*, Tłaczała Marek
    Academic press:
    Electrical conduction of a single electrospun ZnO nanofiber (year: 2014, volume: 97, pages: 1157–1163), Publisher: Wiley-Blackwell
    Status:
    Published
    DOI:
    10.1111/jace.12759 – link to the publication
  10. Improvement of the electron beam lithography contact pads fabrication process

    Authors:
    Indykiewicz Kornelia, Paszkiewicz Regina, Paszkiewicz Bogdan
    Academic press:
    Optica Applicata (year: 2016, volume: 46, pages: 249-254), Publisher: Technical University of Wroclaw
    Status:
    Published
    DOI:
    10.5277/oa160209 – link to the publication
  11. Growth and coalescence control of inclined caxis polar and semipolar GaN multilayer structures grown on Si(111), Si(112), and Si(115) by metalorganic vapor phase epitaxy

    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bartłomiej, Paszkiewicz Bogdan, Paszkiewicz Regina, Sankowska Iwona
    Academic press:
    Journal of Vacuum Science & Technology A (year: 2016, volume: 35, pages: 46030), Publisher: AVS Science and Technology Society
    Status:
    Published
    DOI:
    10.1116/1.4958805 – link to the publication
  12. Microanalysis of the Ti/Al and Ti/Al/Mo/Au ohmic contacts metallization to AlGaN/GaN heterostructures

    Authors:
    Wojciech Macherzynski, Andrzej Stafiniak, Bogdan Paszkiewicz, Jacek Gryglewicz, and Regina Paszkiewicz
    Academic press:
    Physica Status Solidi A (year: 2016, volume: 213, pages: 1145-1149), Publisher: Wiley-VCH in Berlin
    Status:
    Published
    DOI:
    10.1002/pssa.201532684 – link to the publication

Articles in post-conference publications (18)

  1. Investigation of selected material issues of GaN epitaxial layers grown on Si substrates by MOVPE

    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina
    Conference:
    2nd International Conference on Advances in Electronic and Photonic Technologies (year: 2014, pages: s. 140-143), Publisher: University of Žilina
    Date:
    conference June 1-4, 2014
    Status:
    Published
  2. Conductivity model of electrospun ZnO nanofibers

    Authors:
    Stafiniak Andrzej P, Gryglewicz Jacek I, Boratyński Bogusław, Tłaczała Marek
    Conference:
    International Conference on Advances in Electronic and Photonic Technologies (year: 2015, pages: s. 227-230), Publisher: University of Žilina
    Date:
    conference June 1-4, 2015
    Status:
    Published
  3. Improvement of AlGaN/GaN heterostructures electrical performance by altering GaN/sapphire buffers growth pressure.

    Authors:
    Wośko Mateusz M , Paszkiewicz Bogdan , Szymański Tomasz , Paszkiewicz Regina
    Conference:
    16th European Workshop on Metalorganic Vapour Phase Epitaxy (year: 2015, pages: s. 195-198,), Publisher: The Nanometer Structure Consortium at Lund University
    Date:
    conference June 7-10, 2015
    Status:
    Published
  4. THE INFLUENCE OF ALGAN LAYER ETCHING ON THE PARAMETERS OF TI/AL/MO/AU OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURES

    Authors:
    J. Gryglewicz, W. Macherzyński, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (year: 2015, pages: 256-259), Publisher: University of Zilina
    Date:
    conference 1-4.06.2015
    Status:
    Published
  5. Stress determination capabilities of the multilayers AIIIN-based structures grown on Si(11x) by MOVPE method

    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies : proceedings of ADEPT (year: 2016, pages: 23-26), Publisher: University of Žilina
    Date:
    conference June 20-23, 2016
    Status:
    Published
  6. EFFECT OF ANNEALING TEMPERATURE ON THE TI/AL/MO/AU OHMIC CONTACT

    Authors:
    W. Macherzyński, J. Gryglewicz, J. Prazmowska, A. Stafiniak, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (year: 2015, pages: 206-209), Publisher: University of Zilina
    Date:
    conference 1-4.06.2015
    Status:
    Published
  7. Optimization of reactive ion etching process of AlGaN/GaN heteterostructures used for electronic devices

    Authors:
    J. Gryglewicz, W. Macherzyński, A. Stafiniak, M. Wośko, B. Paszkiewicz, R. Paszkiewicz, M.Tłaczała
    Conference:
    10th Interregional Workshop between Saxonia, Silesia and Czech Advanced Nanomaterials - Synthesis, Properties, Characterization (year: 2014, pages: 8), Publisher: Wroclaw University of TEchnology
    Date:
    conference 13-14 November, 2014
    Status:
    Published
  8. ANALYSIS OF METAL-SEMICONDUCTOR INTERFACE AT OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURE

    Authors:
    J. Prażmowska, W. Macherzyński, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (year: 2015, pages: 296-299), Publisher: University of Zilina
    Date:
    conference 1-4.06.2015
    Status:
    Published
  9. Alternative metalization for the Ti/Al/Mo/Au ohmic contact to the AlGaN/GaN heterostructure

    Authors:
    Macherzyński Wojciech, Paszkiewicz Bogdan, Stafiniak Andrzej P, Szymański Tomasz, Paszkiewicz Regina
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (year: 2016, pages: 227-231), Publisher: University of Žilina
    Date:
    conference June 20-23, 2016
    Status:
    Published
  10. LP MOVPE selective epitaxial growth of InP:Fe on nanplanar substrates

    Authors:
    Kosior Łukasz, Badura Mikołaj, Zborowska-Lindert Iwona, Radziewicz Damian, Stafiniak Andrzej P, Ściana Beata, Tłaczała Marek
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies : proceedings of ADEPT (year: 2016, pages: 87-90), Publisher: University of Žilina
    Date:
    conference June 20-23, 2016
    Status:
    Published
  11. Analysis of factors influencing the resolution of gate fabricated by photolitography technique

    Authors:
    J. Prażmowska, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (year: 2016, pages: 223-226), Publisher: University of Žilina
    Date:
    conference June 20-23, 2016
    Status:
    Published
  12. Application of Pd nano-islands for nanostructuring of AlGaN/GaN heterostructures

    Authors:
    Stafiniak Andrzej P, Owczarzak Sławomir, Macherzyński Wojciech
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (year: 2016, pages: 203-206), Publisher: University of Žilina
    Date:
    conference June 20-23, 2016
    Status:
    Published
  13. Different buffer approaches for AlGaN/GaN heterostructures epitaxy on Si(111) substrates

    Authors:
    M. Wosko, B. Paszkiewicz, T. Szymanski, R. Paszkiewicz
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (year: 2014, pages: 81-84), Publisher: Institute of Electronics and Photonics, Bratislava
    Date:
    conference 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  14. Investigation of oxygen plasma etching of diamond-like carbon films

    Authors:
    Kijaszek Wojciech, Prażmowska-Czajka Joanna, Oleszkiewicz Waldemar
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (year: 2016, pages: 95- 98), Publisher: University of Žilina
    Date:
    conference June 20-23, 2016
    Status:
    Published
  15. Influence of V/III ratio during MOVPE GaN buffer growth on the properties of AlGaN/GaN/SiN/AlN/Si(111) structures for HEMT purposes

    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Serafińczuk Jarosław, Drzik Milan, Paszkiewicz Regina
    Conference:
    16th European Workshop on Metalorganic Vapour Phase Epitaxy (year: 2015, pages: s. 207-210), Publisher: The Nanometer Structure Consortium at Lund University
    Date:
    conference June 7-10, 2015
    Status:
    Published
  16. Application of real time in-situ interferometry for the observation of GaN/Si MOVPE growth process

    Authors:
    T. Szymanski, M. Wośko, B. Paszkiewicz, K. Indykiewicz, R. Paszkiewicz
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (year: 2014, pages: 77-80), Publisher: Institute of Electronics and Photonics, Bratislava
    Date:
    conference 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  17. Precise etching of AlGaN/GaN HEMT structures with Cl2/BCl3/Ar plasma

    Authors:
    J. Gryglewicz, R. Paszkiewicz, W. Macherzyński, A. Stafiniak, M. Wośko
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (year: 2014, pages: 73-76), Publisher: Institute of Electronics and Photonics, Bratislava
    Date:
    conference 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  18. Mushroom - like profile fabrication in Lo/Hi resist system by electron beam lithography

    Authors:
    K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    10th Interregional Workshop between Saxonia, Silesia and Czech Advanced Nanomaterials - Synthesis, Properties, Characterization (year: 2014, pages: 12), Publisher: Wroclaw University of TEchnology
    Date:
    conference 13-14 November, 2014
    Status:
    Published

Book publications / chapters in book publications (4)

  1. Materials - Microstructure of the Ti/Al ohmic contacts to the AlGaN/GaN heterostructure

    Authors:
    W. Macherzyński, B. Paszkiewicz, A. Stafiniak, M. Wośko
    Book:
    Vacuum Technique & Technology (year: 2014, volume: 1, pages: 93-99), Publisher: Tele & Radio Research Institute, Warsaw
    Status:
    Published
  2. Wpływ parametrów technologicznych na rozdzielczość struktur testowych Ti/Au wytwarzanych w procesie litografii elektronowej

    Authors:
    Indykiewicz Kornelia
    Book:
    Badani i Rozwój Młodych Naukowców w Polsce - Nauki techniczne i inyżynieryjne (year: 2015, volume: I, pages: 59-63), Publisher: Młodzi Naukowcy
    Status:
    Published
  3. Methods of Characterization - Characterization of diamond-like carbon films deposited by RF ICP PECVD method - investigation of technologica process parameters influence on properties of deposited DLC films

    Authors:
    W. Oleszkiewicz, W. Kijaszek, J. Kovac Jr, J. Kovac, A. Zakrzewski, S. Patela, M. Tlaczala
    Book:
    Vacuum Technique & Technology (year: 2014, volume: 1, pages: 123-136), Publisher: Tele & Radio Research Institute
    Status:
    Published
  4. Wykorzystanie profilometru optycznego w celu badania naprężeń występujących w heterostrukturach AlGaN/GaN osadzanych metodą MOVPE na podłożach krzemowych do zastosowań w tranzystorach typu HEMT

    Authors:
    Szymański Tomasz, Szyszka Adam, Wośko Mateusz M
    Book:
    Badani i Rozwój Młodych Naukowców w Polsce - Polimery i kompozyty (year: 2015, volume: I, pages: 92-97), Publisher: Młodzi Naukowcy 2015
    Status:
    Published

« New search

Graphic design and implementation: Jakub Piotrowski