Study of phenomena at the metal-semiconductor interface in semiconductor devices based on AlGaN/GaN heterostructures
2012/07/D/ST7/02583
Keywords
Descriptors
- ST7_5: Mikro- i nanoelektronika, optoelektronika
Panel
ST7 – Systems and communication engineering: electronics, communication, optoelectronics
Host institution
Politechnika Wrocławska, Wydział Elektroniki Mikrosystemów i Fotoniki
Voivodeship: dolnośląskie
Principal investigator (from the host institution)
dr Wojciech Piotr Macherzyński
Number of co-investigators in the project: 5
Call
SONATA 4 – announced on 2012-09-15
- Amount awarded
- 440 374 PLN
- Project start date
- 2013-07-17
- Project end date
- 2016-11-16
- Project duration
- 40 months (the same as in the proposal)
- Project status
- Project settled
Equipment purchased [PL]
- Pompa typu sorpcyjnego. Cost: 68 374 PLN
Information in the final report
Publication in academic press/journals (12)
-
Stress control by micropits density variation in strained AlGaN/GaN/SiN/AlN/Si(111) heterostructures
- Authors:
- Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Serafińczuk Jarosław, Drzik Milan*, Paszkiewicz Regina
- Academic press:
- Crystal Research and Technology (year: 2016, volume: 51, pages: 225-230), Publisher: John Wiley and Sons Inc.
- Status:
- Published
- DOI:
- 10.1002/crat.201500276 – link to the publication
-
Surface topography analysis with application of roughness area dependence method
- Authors:
- Szyszka Adam, Wośko Mateusz M, Szymański Tomasz, Paszkiewicz Regina
- Academic press:
- Ultramicroscopy (year: 2016, volume: 170, pages: s. 77-85), Publisher: Elsevier
- Status:
- Published
- DOI:
- 10.1016/j.ultramic.2016.07.017 – link to the publication
-
The Meyer–Neldel rule in conduction mechanism of the electrospun ZnO nanofibers
- Authors:
- Stafiniak Andrzej P, Tłaczała Marek
- Academic press:
- NANO: Brief Reports and Reviews (year: 2016, volume: 11, pages: 1650025-1 - 1650025-5), Publisher: World Scientific Publishing Co. Pte Ltd
- Status:
- Published
- DOI:
- 10.1142/S1793292016500259 – link to the publication
-
Black phosphorus saturable absorber for ultrashort pulse generation
- Authors:
- J. Sotor, G. Soboń, W. Macherzyński, P. Paletko, K. M. Abramski
- Academic press:
- Applied Physics Letters (year: 2015, volume: 107, pages: 051108-1, 051108-1), Publisher: American Institute of Physics Publishing
- Status:
- Published
- DOI:
- 10.1063/1.4927673 – link to the publication
-
CORRELATION OF SELECTED PROBLEMS DURING GaN MOVPE EPITAXY ON Si SUBSTRATES WITH IN–SITU INTERFEROMETER OBSERVATION
- Authors:
- Tomasz Szymański, Mateusz Wośko, Bogdan Paszkiewicz, Kornelia Indykiewicz, Regina Paszkiewicz
- Academic press:
- Journal of ELECTRICAL ENGINEERING (year: 2014, volume: 65, pages: 294-298), Publisher: Slovenska Technicka Univerzita
- Status:
- Published
- DOI:
- 10.2478/jee-2014-0047 – link to the publication
-
GaN/AlN superlattice high electronmobility transistor heterostructureson GaN/Si(111)
- Authors:
- Mateusz Wośko, Bogdan Paszkiewicz, Andrej Vincze, Tomasz Szymański, Regina Paszkiewicz
- Academic press:
- Phys. Status Solidi B (year: 2015, volume: 252, pages: 1195– 1200), Publisher: Wiley-VCH Verlag
- Status:
- Published
- DOI:
- 10.1002/pssb.201451596 – link to the publication
-
Optimization of AlGaN/GaN/Si(111) buffer growth conditions for nitride based HEMTs on silicon substrates
- Authors:
- Mateusz Wośko, Bogdan Paszkiewicz, Tomasz Szymański, Regina Paszkiewicz
- Academic press:
- Journal of Crystal Growth (year: 2015, volume: 414, pages: 248-253), Publisher: Elsevier
- Status:
- Published
- DOI:
- 10.1016/j.jcrysgro.2014.10.048 – link to the publication
-
Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application
- Authors:
- Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina, Drzik Milan
- Academic press:
- Journal of Vacuum Science & Technology A (year: 2015, volume: 33, pages: 46029), Publisher: AVS Science and Technology Society
- Status:
- Published
- DOI:
- 10.1116/1.4921581 – link to the publication
-
Electrical conduction of a single electrospun ZnO nanofiber
- Authors:
- Stafiniak Andrzej P, Boratyński Bogusław, Baranowska-Korczyc Anna*, Fronc Krzysztof*, Elbaum Danek*, Tłaczała Marek
- Academic press:
- Electrical conduction of a single electrospun ZnO nanofiber (year: 2014, volume: 97, pages: 1157–1163), Publisher: Wiley-Blackwell
- Status:
- Published
- DOI:
- 10.1111/jace.12759 – link to the publication
-
Improvement of the electron beam lithography contact pads fabrication process
- Authors:
- Indykiewicz Kornelia, Paszkiewicz Regina, Paszkiewicz Bogdan
- Academic press:
- Optica Applicata (year: 2016, volume: 46, pages: 249-254), Publisher: Technical University of Wroclaw
- Status:
- Published
- DOI:
- 10.5277/oa160209 – link to the publication
-
Growth and coalescence control of inclined caxis polar and semipolar GaN multilayer structures grown on Si(111), Si(112), and Si(115) by metalorganic vapor phase epitaxy
- Authors:
- Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bartłomiej, Paszkiewicz Bogdan, Paszkiewicz Regina, Sankowska Iwona
- Academic press:
- Journal of Vacuum Science & Technology A (year: 2016, volume: 35, pages: 46030), Publisher: AVS Science and Technology Society
- Status:
- Published
- DOI:
- 10.1116/1.4958805 – link to the publication
-
Microanalysis of the Ti/Al and Ti/Al/Mo/Au ohmic contacts metallization to AlGaN/GaN heterostructures
- Authors:
- Wojciech Macherzynski, Andrzej Stafiniak, Bogdan Paszkiewicz, Jacek Gryglewicz, and Regina Paszkiewicz
- Academic press:
- Physica Status Solidi A (year: 2016, volume: 213, pages: 1145-1149), Publisher: Wiley-VCH in Berlin
- Status:
- Published
- DOI:
- 10.1002/pssa.201532684 – link to the publication
Articles in post-conference publications (18)
-
Investigation of selected material issues of GaN epitaxial layers grown on Si substrates by MOVPE
- Authors:
- Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina
- Conference:
- 2nd International Conference on Advances in Electronic and Photonic Technologies (year: 2014, pages: s. 140-143), Publisher: University of Žilina
- Date:
- conference June 1-4, 2014
- Status:
- Published
-
Conductivity model of electrospun ZnO nanofibers
- Authors:
- Stafiniak Andrzej P, Gryglewicz Jacek I, Boratyński Bogusław, Tłaczała Marek
- Conference:
- International Conference on Advances in Electronic and Photonic Technologies (year: 2015, pages: s. 227-230), Publisher: University of Žilina
- Date:
- conference June 1-4, 2015
- Status:
- Published
-
Improvement of AlGaN/GaN heterostructures electrical performance by altering GaN/sapphire buffers growth pressure.
- Authors:
- Wośko Mateusz M , Paszkiewicz Bogdan , Szymański Tomasz , Paszkiewicz Regina
- Conference:
- 16th European Workshop on Metalorganic Vapour Phase Epitaxy (year: 2015, pages: s. 195-198,), Publisher: The Nanometer Structure Consortium at Lund University
- Date:
- conference June 7-10, 2015
- Status:
- Published
-
THE INFLUENCE OF ALGAN LAYER ETCHING ON THE PARAMETERS OF TI/AL/MO/AU OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURES
- Authors:
- J. Gryglewicz, W. Macherzyński, B. Paszkiewicz, R. Paszkiewicz
- Conference:
- Advances in Electronic and Photonic Technologies (year: 2015, pages: 256-259), Publisher: University of Zilina
- Date:
- conference 1-4.06.2015
- Status:
- Published
-
Stress determination capabilities of the multilayers AIIIN-based structures grown on Si(11x) by MOVPE method
- Authors:
- Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina
- Conference:
- 4th International Conference on Advances in Electronic and Photonic Technologies : proceedings of ADEPT (year: 2016, pages: 23-26), Publisher: University of Žilina
- Date:
- conference June 20-23, 2016
- Status:
- Published
-
EFFECT OF ANNEALING TEMPERATURE ON THE TI/AL/MO/AU OHMIC CONTACT
- Authors:
- W. Macherzyński, J. Gryglewicz, J. Prazmowska, A. Stafiniak, R. Paszkiewicz
- Conference:
- Advances in Electronic and Photonic Technologies (year: 2015, pages: 206-209), Publisher: University of Zilina
- Date:
- conference 1-4.06.2015
- Status:
- Published
-
Optimization of reactive ion etching process of AlGaN/GaN heteterostructures used for electronic devices
- Authors:
- J. Gryglewicz, W. Macherzyński, A. Stafiniak, M. Wośko, B. Paszkiewicz, R. Paszkiewicz, M.Tłaczała
- Conference:
- 10th Interregional Workshop between Saxonia, Silesia and Czech Advanced Nanomaterials - Synthesis, Properties, Characterization (year: 2014, pages: 8), Publisher: Wroclaw University of TEchnology
- Date:
- conference 13-14 November, 2014
- Status:
- Published
-
ANALYSIS OF METAL-SEMICONDUCTOR INTERFACE AT OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURE
- Authors:
- J. Prażmowska, W. Macherzyński, R. Paszkiewicz
- Conference:
- Advances in Electronic and Photonic Technologies (year: 2015, pages: 296-299), Publisher: University of Zilina
- Date:
- conference 1-4.06.2015
- Status:
- Published
-
Alternative metalization for the Ti/Al/Mo/Au ohmic contact to the AlGaN/GaN heterostructure
- Authors:
- Macherzyński Wojciech, Paszkiewicz Bogdan, Stafiniak Andrzej P, Szymański Tomasz, Paszkiewicz Regina
- Conference:
- 4th International Conference on Advances in Electronic and Photonic Technologies (year: 2016, pages: 227-231), Publisher: University of Žilina
- Date:
- conference June 20-23, 2016
- Status:
- Published
-
LP MOVPE selective epitaxial growth of InP:Fe on nanplanar substrates
- Authors:
- Kosior Łukasz, Badura Mikołaj, Zborowska-Lindert Iwona, Radziewicz Damian, Stafiniak Andrzej P, Ściana Beata, Tłaczała Marek
- Conference:
- 4th International Conference on Advances in Electronic and Photonic Technologies : proceedings of ADEPT (year: 2016, pages: 87-90), Publisher: University of Žilina
- Date:
- conference June 20-23, 2016
- Status:
- Published
-
Analysis of factors influencing the resolution of gate fabricated by photolitography technique
- Authors:
- J. Prażmowska, B. Paszkiewicz, R. Paszkiewicz
- Conference:
- 4th International Conference on Advances in Electronic and Photonic Technologies (year: 2016, pages: 223-226), Publisher: University of Žilina
- Date:
- conference June 20-23, 2016
- Status:
- Published
-
Application of Pd nano-islands for nanostructuring of AlGaN/GaN heterostructures
- Authors:
- Stafiniak Andrzej P, Owczarzak Sławomir, Macherzyński Wojciech
- Conference:
- 4th International Conference on Advances in Electronic and Photonic Technologies (year: 2016, pages: 203-206), Publisher: University of Žilina
- Date:
- conference June 20-23, 2016
- Status:
- Published
-
Different buffer approaches for AlGaN/GaN heterostructures epitaxy on Si(111) substrates
- Authors:
- M. Wosko, B. Paszkiewicz, T. Szymanski, R. Paszkiewicz
- Conference:
- The 10th International Conference on Advanced Semiconductor Devices and Microsystems (year: 2014, pages: 81-84), Publisher: Institute of Electronics and Photonics, Bratislava
- Date:
- conference 20-22 October 2014
- Status:
- Published
- DOI:
- link to the publication
-
Investigation of oxygen plasma etching of diamond-like carbon films
- Authors:
- Kijaszek Wojciech, Prażmowska-Czajka Joanna, Oleszkiewicz Waldemar
- Conference:
- 4th International Conference on Advances in Electronic and Photonic Technologies (year: 2016, pages: 95- 98), Publisher: University of Žilina
- Date:
- conference June 20-23, 2016
- Status:
- Published
-
Influence of V/III ratio during MOVPE GaN buffer growth on the properties of AlGaN/GaN/SiN/AlN/Si(111) structures for HEMT purposes
- Authors:
- Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Serafińczuk Jarosław, Drzik Milan, Paszkiewicz Regina
- Conference:
- 16th European Workshop on Metalorganic Vapour Phase Epitaxy (year: 2015, pages: s. 207-210), Publisher: The Nanometer Structure Consortium at Lund University
- Date:
- conference June 7-10, 2015
- Status:
- Published
-
Application of real time in-situ interferometry for the observation of GaN/Si MOVPE growth process
- Authors:
- T. Szymanski, M. Wośko, B. Paszkiewicz, K. Indykiewicz, R. Paszkiewicz
- Conference:
- The 10th International Conference on Advanced Semiconductor Devices and Microsystems (year: 2014, pages: 77-80), Publisher: Institute of Electronics and Photonics, Bratislava
- Date:
- conference 20-22 October 2014
- Status:
- Published
- DOI:
- link to the publication
-
Precise etching of AlGaN/GaN HEMT structures with Cl2/BCl3/Ar plasma
- Authors:
- J. Gryglewicz, R. Paszkiewicz, W. Macherzyński, A. Stafiniak, M. Wośko
- Conference:
- The 10th International Conference on Advanced Semiconductor Devices and Microsystems (year: 2014, pages: 73-76), Publisher: Institute of Electronics and Photonics, Bratislava
- Date:
- conference 20-22 October 2014
- Status:
- Published
- DOI:
- link to the publication
-
Mushroom - like profile fabrication in Lo/Hi resist system by electron beam lithography
- Authors:
- K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz
- Conference:
- 10th Interregional Workshop between Saxonia, Silesia and Czech Advanced Nanomaterials - Synthesis, Properties, Characterization (year: 2014, pages: 12), Publisher: Wroclaw University of TEchnology
- Date:
- conference 13-14 November, 2014
- Status:
- Published
Book publications / chapters in book publications (4)
-
Materials - Microstructure of the Ti/Al ohmic contacts to the AlGaN/GaN heterostructure
- Authors:
- W. Macherzyński, B. Paszkiewicz, A. Stafiniak, M. Wośko
- Book:
- Vacuum Technique & Technology (year: 2014, volume: 1, pages: 93-99), Publisher: Tele & Radio Research Institute, Warsaw
- Status:
- Published
-
Wpływ parametrów technologicznych na rozdzielczość struktur testowych Ti/Au wytwarzanych w procesie litografii elektronowej
- Authors:
- Indykiewicz Kornelia
- Book:
- Badani i Rozwój Młodych Naukowców w Polsce - Nauki techniczne i inyżynieryjne (year: 2015, volume: I, pages: 59-63), Publisher: Młodzi Naukowcy
- Status:
- Published
-
Methods of Characterization - Characterization of diamond-like carbon films deposited by RF ICP PECVD method - investigation of technologica process parameters influence on properties of deposited DLC films
- Authors:
- W. Oleszkiewicz, W. Kijaszek, J. Kovac Jr, J. Kovac, A. Zakrzewski, S. Patela, M. Tlaczala
- Book:
- Vacuum Technique & Technology (year: 2014, volume: 1, pages: 123-136), Publisher: Tele & Radio Research Institute
- Status:
- Published
-
Wykorzystanie profilometru optycznego w celu badania naprężeń występujących w heterostrukturach AlGaN/GaN osadzanych metodą MOVPE na podłożach krzemowych do zastosowań w tranzystorach typu HEMT
- Authors:
- Szymański Tomasz, Szyszka Adam, Wośko Mateusz M
- Book:
- Badani i Rozwój Młodych Naukowców w Polsce - Polimery i kompozyty (year: 2015, volume: I, pages: 92-97), Publisher: Młodzi Naukowcy 2015
- Status:
- Published