Projects funded by the NCN

Information on the principal investigator and host institution

Information of the project and the call

Keywords

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Study of phenomena at the metal-semiconductor interface in semiconductor devices based on AlGaN/GaN heterostructures

2012/07/D/ST7/02583

Keywords:

ohmic contact AlGaN/GaN heterostructures

Descriptors:

  • ST7_5: Micro- and nanelectronic, optoelectronic and photonic components

Panel:

ST7 - Systems and communication engineering: electronics, communication, optoelectronics

Host institution :

Politechnika Wrocławska, Wydział Elektroniki Mikrosystemów i Fotoniki

woj. dolnośląskie

Other projects carried out by the institution 

Principal investigator (from the host institution):

dr Wojciech Macherzyński 

Number of co-investigators in the project: 5

Call: SONATA 4 - announced on 2012-09-15

Amount awarded: 440 374 PLN

Project start date (Y-m-d): 2013-07-17

Project end date (Y-m-d): 2016-11-16

Project duration:: 40 months (the same as in the proposal)

Project status: Project settled

Equipment purchased [PL]

  1. Pompa typu sorpcyjnego (68 374 PLN)

Information in the final report

  • Publication in academic press/journals (12)
  • Articles in post-conference publications (18)
  • Book publications / chapters in book publications (4)
  1. Electrical conduction of a single electrospun ZnO nanofiber
    Authors:
    Stafiniak Andrzej P, Boratyński Bogusław, Baranowska-Korczyc Anna*, Fronc Krzysztof*, Elbaum Danek*, Tłaczała Marek
    Academic press:
    Electrical conduction of a single electrospun ZnO nanofiber (rok: 2014, tom: 97, strony: 1157–1163), Wydawca: Wiley-Blackwell
    Status:
    Published
    DOI:
    10.1111/jace.12759 - link to the publication
  2. Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina, Drzik Milan
    Academic press:
    Journal of Vacuum Science & Technology A (rok: 2015, tom: 33, strony: 45298), Wydawca: AVS Science and Technology Society
    Status:
    Published
    DOI:
    10.1116/1.4921581 - link to the publication
  3. Black phosphorus saturable absorber for ultrashort pulse generation
    Authors:
    J. Sotor, G. Soboń, W. Macherzyński, P. Paletko, K. M. Abramski
    Academic press:
    Applied Physics Letters (rok: 2015, tom: 107, strony: 051108-1, 051108-1), Wydawca: American Institute of Physics Publishing
    Status:
    Published
    DOI:
    10.1063/1.4927673 - link to the publication
  4. Improvement of the electron beam lithography contact pads fabrication process
    Authors:
    Indykiewicz Kornelia, Paszkiewicz Regina, Paszkiewicz Bogdan
    Academic press:
    Optica Applicata (rok: 2016, tom: 46, strony: 249-254), Wydawca: Technical University of Wroclaw
    Status:
    Published
    DOI:
    10.5277/oa160209 - link to the publication
  5. Optimization of AlGaN/GaN/Si(111) buffer growth conditions for nitride based HEMTs on silicon substrates
    Authors:
    Mateusz Wośko, Bogdan Paszkiewicz, Tomasz Szymański, Regina Paszkiewicz
    Academic press:
    Journal of Crystal Growth (rok: 2015, tom: 414, strony: 248-253), Wydawca: Elsevier
    Status:
    Published
    DOI:
    10.048 - link to the publication
  6. CORRELATION OF SELECTED PROBLEMS DURING GaN MOVPE EPITAXY ON Si SUBSTRATES WITH IN–SITU INTERFEROMETER OBSERVATION
    Authors:
    Tomasz Szymański, Mateusz Wośko, Bogdan Paszkiewicz, Kornelia Indykiewicz, Regina Paszkiewicz
    Academic press:
    Journal of ELECTRICAL ENGINEERING (rok: 2014, tom: 65, strony: 294-298), Wydawca: Slovenska Technicka Univerzita
    Status:
    Published
    DOI:
    10.2478/jee-2014-0047 - link to the publication
  7. Microanalysis of the Ti/Al and Ti/Al/Mo/Au ohmic contacts metallization to AlGaN/GaN heterostructures
    Authors:
    Wojciech Macherzynski, Andrzej Stafiniak, Bogdan Paszkiewicz, Jacek Gryglewicz, and Regina Paszkiewicz
    Academic press:
    Physica Status Solidi A (rok: 2016, tom: 213, strony: 1145-1149), Wydawca: Wiley-VCH in Berlin
    Status:
    Published
    DOI:
    10.1002/pssa.201532684 - link to the publication
  8. Stress control by micropits density variation in strained AlGaN/GaN/SiN/AlN/Si(111) heterostructures
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Serafińczuk Jarosław, Drzik Milan*, Paszkiewicz Regina
    Academic press:
    Crystal Research and Technology (rok: 2016, tom: 51, strony: 225-230), Wydawca: John Wiley and Sons Inc.
    Status:
    Published
    DOI:
    10.1002/crat.201500276 - link to the publication
  9. The Meyer–Neldel rule in conduction mechanism of the electrospun ZnO nanofibers
    Authors:
    Stafiniak Andrzej P, Tłaczała Marek
    Academic press:
    NANO: Brief Reports and Reviews (rok: 2016, tom: 11, strony: 1650025-1 - 1650025-5), Wydawca: World Scientific Publishing Co. Pte Ltd
    Status:
    Published
    DOI:
    10.1142/S1793292016500259 - link to the publication
  10. GaN/AlN superlattice high electronmobility transistor heterostructureson GaN/Si(111)
    Authors:
    Mateusz Wośko, Bogdan Paszkiewicz, Andrej Vincze, Tomasz Szymański, Regina Paszkiewicz
    Academic press:
    Phys. Status Solidi B (rok: 2015, tom: 252, strony: 1195– 1200), Wydawca: Wiley-VCH Verlag
    Status:
    Published
    DOI:
    10.1002/pssb.201451596 - link to the publication
  11. Surface topography analysis with application of roughness area dependence method
    Authors:
    Szyszka Adam, Wośko Mateusz M, Szymański Tomasz, Paszkiewicz Regina
    Academic press:
    Ultramicroscopy (rok: 2016, tom: 170, strony: s. 77-85), Wydawca: Elsevier
    Status:
    Published
    DOI:
    10.1016/j.ultramic.2016.07.017 - link to the publication
  12. Growth and coalescence control of inclined caxis polar and semipolar GaN multilayer structures grown on Si(111), Si(112), and Si(115) by metalorganic vapor phase epitaxy
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bartłomiej, Paszkiewicz Bogdan, Paszkiewicz Regina, Sankowska Iwona
    Academic press:
    Journal of Vacuum Science & Technology A (rok: 2016, tom: 35, strony: 45299), Wydawca: AVS Science and Technology Society
    Status:
    Published
    DOI:
    10.1116/1.4958805 - link to the publication
  1. Alternative metalization for the Ti/Al/Mo/Au ohmic contact to the AlGaN/GaN heterostructure
    Authors:
    Macherzyński Wojciech, Paszkiewicz Bogdan, Stafiniak Andrzej P, Szymański Tomasz, Paszkiewicz Regina
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  2. Different buffer approaches for AlGaN/GaN heterostructures epitaxy on Si(111) substrates
    Authors:
    M. Wosko, B. Paszkiewicz, T. Szymanski, R. Paszkiewicz
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (rok: 2014, ), Wydawca: Institute of Electronics and Photonics, Bratislava
    Data:
    konferencja 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  3. EFFECT OF ANNEALING TEMPERATURE ON THE TI/AL/MO/AU OHMIC CONTACT
    Authors:
    W. Macherzyński, J. Gryglewicz, J. Prazmowska, A. Stafiniak, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Zilina
    Data:
    konferencja 1-4.06.2015
    Status:
    Published
  4. Influence of V/III ratio during MOVPE GaN buffer growth on the properties of AlGaN/GaN/SiN/AlN/Si(111) structures for HEMT purposes
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Serafińczuk Jarosław, Drzik Milan, Paszkiewicz Regina
    Conference:
    16th European Workshop on Metalorganic Vapour Phase Epitaxy (rok: 2015, ), Wydawca: The Nanometer Structure Consortium at Lund University
    Data:
    konferencja June 7-10, 2015
    Status:
    Published
  5. Investigation of oxygen plasma etching of diamond-like carbon films
    Authors:
    Kijaszek Wojciech, Prażmowska-Czajka Joanna, Oleszkiewicz Waldemar
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  6. Application of Pd nano-islands for nanostructuring of AlGaN/GaN heterostructures
    Authors:
    Stafiniak Andrzej P, Owczarzak Sławomir, Macherzyński Wojciech
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  7. LP MOVPE selective epitaxial growth of InP:Fe on nanplanar substrates
    Authors:
    Kosior Łukasz, Badura Mikołaj, Zborowska-Lindert Iwona, Radziewicz Damian, Stafiniak Andrzej P, Ściana Beata, Tłaczała Marek
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies : proceedings of ADEPT (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  8. Mushroom - like profile fabrication in Lo/Hi resist system by electron beam lithography
    Authors:
    K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    10th Interregional Workshop between Saxonia, Silesia and Czech "Advanced Nanomaterials - Synthesis, Properties, Characterization" (rok: 2014, ), Wydawca: Wroclaw University of TEchnology
    Data:
    konferencja 13-14 November, 2014
    Status:
    Published
  9. Optimization of reactive ion etching process of AlGaN/GaN heteterostructures used for electronic devices
    Authors:
    J. Gryglewicz, W. Macherzyński, A. Stafiniak, M. Wośko, B. Paszkiewicz, R. Paszkiewicz, M.Tłaczała
    Conference:
    10th Interregional Workshop between Saxonia, Silesia and Czech "Advanced Nanomaterials - Synthesis, Properties, Characterization" (rok: 2014, ), Wydawca: Wroclaw University of TEchnology
    Data:
    konferencja 13-14 November, 2014
    Status:
    Published
  10. Conductivity model of electrospun ZnO nanofibers
    Authors:
    Stafiniak Andrzej P, Gryglewicz Jacek I, Boratyński Bogusław, Tłaczała Marek
    Conference:
    International Conference on Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Žilina
    Data:
    konferencja June 1-4, 2015
    Status:
    Published
  11. ANALYSIS OF METAL-SEMICONDUCTOR INTERFACE AT OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURE
    Authors:
    J. Prażmowska, W. Macherzyński, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Zilina
    Data:
    konferencja 1-4.06.2015
    Status:
    Published
  12. Analysis of factors influencing the resolution of gate fabricated by photolitography technique
    Authors:
    J. Prażmowska, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  13. Application of real time in-situ interferometry for the observation of GaN/Si MOVPE growth process
    Authors:
    T. Szymanski, M. Wośko, B. Paszkiewicz, K. Indykiewicz, R. Paszkiewicz
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (rok: 2014, ), Wydawca: Institute of Electronics and Photonics, Bratislava
    Data:
    konferencja 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  14. Improvement of AlGaN/GaN heterostructures electrical performance by altering GaN/sapphire buffers growth pressure.
    Authors:
    Wośko Mateusz M , Paszkiewicz Bogdan , Szymański Tomasz , Paszkiewicz Regina
    Conference:
    16th European Workshop on Metalorganic Vapour Phase Epitaxy (rok: 2015, ), Wydawca: The Nanometer Structure Consortium at Lund University
    Data:
    konferencja June 7-10, 2015
    Status:
    Published
  15. Investigation of selected material issues of GaN epitaxial layers grown on Si substrates by MOVPE
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina
    Conference:
    2nd International Conference on Advances in Electronic and Photonic Technologies (rok: 2014, ), Wydawca: University of Žilina
    Data:
    konferencja June 1-4, 2014
    Status:
    Published
  16. Precise etching of AlGaN/GaN HEMT structures with Cl2/BCl3/Ar plasma
    Authors:
    J. Gryglewicz, R. Paszkiewicz, W. Macherzyński, A. Stafiniak, M. Wośko
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (rok: 2014, ), Wydawca: Institute of Electronics and Photonics, Bratislava
    Data:
    konferencja 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  17. Stress determination capabilities of the multilayers AIIIN-based structures grown on Si(11x) by MOVPE method
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies : proceedings of ADEPT (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  18. THE INFLUENCE OF ALGAN LAYER ETCHING ON THE PARAMETERS OF TI/AL/MO/AU OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURES
    Authors:
    J. Gryglewicz, W. Macherzyński, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Zilina
    Data:
    konferencja 1-4.06.2015
    Status:
    Published
  1. Wpływ parametrów technologicznych na rozdzielczość struktur testowych Ti/Au wytwarzanych w procesie litografii elektronowej
    Authors:
    Indykiewicz Kornelia
    Book:
    Badani i Rozwój Młodych Naukowców w Polsce - Nauki techniczne i inyżynieryjne (rok: 2015, tom: I, strony: 59-63), Wydawca: Młodzi Naukowcy
    Status:
    Published
  2. Wykorzystanie profilometru optycznego w celu badania naprężeń występujących w heterostrukturach AlGaN/GaN osadzanych metodą MOVPE na podłożach krzemowych do zastosowań w tranzystorach typu HEMT
    Authors:
    Szymański Tomasz, Szyszka Adam, Wośko Mateusz M
    Book:
    Badani i Rozwój Młodych Naukowców w Polsce - Polimery i kompozyty (rok: 2015, tom: I, strony: 92-97), Wydawca: Młodzi Naukowcy 2015
    Status:
    Published
  3. Materials - Microstructure of the Ti/Al ohmic contacts to the AlGaN/GaN heterostructure
    Authors:
    W. Macherzyński, B. Paszkiewicz, A. Stafiniak, M. Wośko
    Book:
    Vacuum Technique & Technology (rok: 2014, tom: 1, strony: 93-99), Wydawca: Tele & Radio Research Institute, Warsaw
    Status:
    Published
  4. Methods of Characterization - Characterization of diamond-like carbon films deposited by RF ICP PECVD method - investigation of technologica process parameters influence on properties of deposited DLC films
    Authors:
    W. Oleszkiewicz, W. Kijaszek, J. Kovac Jr, J. Kovac, A. Zakrzewski, S. Patela, M. Tlaczala
    Book:
    Vacuum Technique & Technology (rok: 2014, tom: 1, strony: 123-136), Wydawca: Tele & Radio Research Institute
    Status:
    Published

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