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Information of the project and the call

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Study of phenomena at the metal-semiconductor interface in semiconductor devices based on AlGaN/GaN heterostructures

2012/07/D/ST7/02583

Keywords:

ohmic contact AlGaN/GaN heterostructures

Descriptors:

  • ST7_5:

Panel:

ST7 - Systems and communication engineering: electronics, communication, optoelectronics

Host institution :

Politechnika Wrocławska, Wydział Elektroniki Mikrosystemów i Fotoniki

woj. dolnośląskie

Other projects carried out by the institution 

Principal investigator (from the host institution):

dr Wojciech Piotr Macherzyński 

Number of co-investigators in the project: 5

Call: SONATA 4 - announced on 2012-09-15

Amount awarded: 440 374 PLN

Project start date (Y-m-d): 2013-07-17

Project end date (Y-m-d): 2016-11-16

Project duration:: 40 months (the same as in the proposal)

Project status: Project settled

Equipment purchased [PL]

  1. Pompa typu sorpcyjnego (68 374 PLN)

Information in the final report

  • Publication in academic press/journals (13)
  • Articles in post-conference publications (22)
  • Book publications / chapters in book publications (4)
  1. Growth and coalescence control of inclined caxis polar and semipolar GaN multilayer structures grown on Si(111), Si(112), and Si(115) by metalorganic vapor phase epitaxy
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bartłomiej, Paszkiewicz Bogdan, Paszkiewicz Regina, Sankowska Iwona
    Academic press:
    Journal of Vacuum Science & Technology A (rok: 2016, tom: 35, strony: 45665), Wydawca: AVS Science and Technology Society
    Status:
    Published
    DOI:
    10.1116/1.4958805 - link to the publication
  2. Microanalysis of the Ti/Al and Ti/Al/Mo/Au ohmic contacts metallization to AlGaN/GaN heterostructures
    Authors:
    Wojciech Macherzynski, Andrzej Stafiniak, Bogdan Paszkiewicz, Jacek Gryglewicz, and Regina Paszkiewicz
    Academic press:
    Physica Status Solidi A (rok: 2016, tom: 213, strony: 1145-1149), Wydawca: Wiley-VCH in Berlin
    Status:
    Published
    DOI:
    10.1002/pssa.201532684 - link to the publication
  3. Surface topography analysis with application of roughness area dependence method
    Authors:
    Szyszka Adam, Wośko Mateusz M, Szymański Tomasz, Paszkiewicz Regina
    Academic press:
    Ultramicroscopy (rok: 2016, tom: 170, strony: s. 77-85), Wydawca: Elsevier
    Status:
    Published
    DOI:
    10.1016/j.ultramic.2016.07.017 - link to the publication
  4. Improvement of the electron beam lithography contact pads fabrication process
    Authors:
    Indykiewicz Kornelia, Paszkiewicz Regina, Paszkiewicz Bogdan
    Academic press:
    Optica Applicata (rok: 2016, tom: 46, strony: 249-254), Wydawca: Technical University of Wroclaw
    Status:
    Published
    DOI:
    10.5277/oa160209 - link to the publication
  5. The Meyer–Neldel rule in conduction mechanism of the electrospun ZnO nanofibers
    Authors:
    Stafiniak Andrzej P, Tłaczała Marek
    Academic press:
    NANO: Brief Reports and Reviews (rok: 2016, tom: 11, strony: 1650025-1 - 1650025-5), Wydawca: World Scientific Publishing Co. Pte Ltd
    Status:
    Published
    DOI:
    10.1142/S1793292016500259 - link to the publication
  6. Black phosphorus saturable absorber for ultrashort pulse generation
    Authors:
    J. Sotor, G. Soboń, W. Macherzyński, P. Paletko, K. M. Abramski
    Academic press:
    Applied Physics Letters (rok: 2015, tom: 107, strony: 051108-1, 051108-1), Wydawca: American Institute of Physics Publishing
    Status:
    Published
    DOI:
    10.1063/1.4927673 - link to the publication
  7. GaN/AlN superlattice high electronmobility transistor heterostructureson GaN/Si(111)
    Authors:
    Mateusz Wośko, Bogdan Paszkiewicz, Andrej Vincze, Tomasz Szymański, Regina Paszkiewicz
    Academic press:
    Phys. Status Solidi B (rok: 2015, tom: 252, strony: 1195– 1200), Wydawca: Wiley-VCH Verlag
    Status:
    Published
    DOI:
    10.1002/pssb.201451596 - link to the publication
  8. Stress engineering in GaN structures grown on Si(111) substrates by SiN masking layer application
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina, Drzik Milan
    Academic press:
    Journal of Vacuum Science & Technology A (rok: 2015, tom: 33, strony: 45664), Wydawca: AVS Science and Technology Society
    Status:
    Published
    DOI:
    10.1116/1.4921581 - link to the publication
  9. Stress control by micropits density variation in strained AlGaN/GaN/SiN/AlN/Si(111) heterostructures
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Serafińczuk Jarosław, Drzik Milan*, Paszkiewicz Regina
    Academic press:
    Crystal Research and Technology (rok: 2016, tom: 51, strony: 225-230), Wydawca: John Wiley and Sons Inc.
    Status:
    Published
    DOI:
    10.1002/crat.201500276 - link to the publication
  10. Optimization of AlGaN/GaN/Si(111) buffer growth conditions for nitride based HEMTs on silicon substrates
    Authors:
    Mateusz Wośko, Bogdan Paszkiewicz, Tomasz Szymański, Regina Paszkiewicz
    Academic press:
    Journal of Crystal Growth (rok: 2015, tom: 414, strony: 248-253), Wydawca: Elsevier
    Status:
    Published
    DOI:
    10.048 - link to the publication
  11. CORRELATION OF SELECTED PROBLEMS DURING GaN MOVPE EPITAXY ON Si SUBSTRATES WITH IN–SITU INTERFEROMETER OBSERVATION
    Authors:
    Tomasz Szymański, Mateusz Wośko, Bogdan Paszkiewicz, Kornelia Indykiewicz, Regina Paszkiewicz
    Academic press:
    Journal of ELECTRICAL ENGINEERING (rok: 2014, tom: 65, strony: 294-298), Wydawca: Slovenska Technicka Univerzita
    Status:
    Published
    DOI:
    10.2478/jee-2014-0047 - link to the publication
  12. Electrical conduction of a single electrospun ZnO nanofiber
    Authors:
    Stafiniak Andrzej P, Boratyński Bogusław, Baranowska-Korczyc Anna*, Fronc Krzysztof*, Elbaum Danek*, Tłaczała Marek
    Academic press:
    Electrical conduction of a single electrospun ZnO nanofiber (rok: 2014, tom: 97, strony: 1157–1163), Wydawca: Wiley-Blackwell
    Status:
    Published
    DOI:
    10.1111/jace.12759 - link to the publication
  13. CORRELATION OF SELECTED PROBLEMS DURING GaN MOVPE EPITAXY ON Si SUBSTRATES WITH IN–SITU INTERFEROMETER OBSERVATION
    Authors:
    Tomasz Szymański, Mateusz Wośko, Bogdan Paszkiewicz, Kornelia Indykiewicz, Regina Paszkiewicz
    Academic press:
    Journal of ELECTRICAL ENGINEERING (rok: 2014, tom: 65, strony: 294-298), Wydawca: Slovenska Technicka Univerzita
    Status:
    Published
    DOI:
    10.2478/jee-2014-0047 - link to the publication
  1. THE INFLUENCE OF ALGAN LAYER ETCHING ON THE PARAMETERS OF TI/AL/MO/AU OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURES
    Authors:
    J. Gryglewicz, W. Macherzyński, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Zilina
    Data:
    konferencja 1-4.06.2015
    Status:
    Published
  2. EFFECT OF ANNEALING TEMPERATURE ON THE TI/AL/MO/AU OHMIC CONTACT
    Authors:
    W. Macherzyński, J. Gryglewicz, J. Prazmowska, A. Stafiniak, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Zilina
    Data:
    konferencja 1-4.06.2015
    Status:
    Published
  3. Stress determination capabilities of the multilayers AIIIN-based structures grown on Si(11x) by MOVPE method
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies : proceedings of ADEPT (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  4. Mushroom - like profile fabrication in Lo/Hi resist system by electron beam lithography
    Authors:
    K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    10th Interregional Workshop between Saxonia, Silesia and Czech "Advanced Nanomaterials - Synthesis, Properties, Characterization" (rok: 2014, ), Wydawca: Wroclaw University of TEchnology
    Data:
    konferencja 13-14 November, 2014
    Status:
    Published
  5. Investigation of selected material issues of GaN epitaxial layers grown on Si substrates by MOVPE
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Paszkiewicz Regina
    Conference:
    2nd International Conference on Advances in Electronic and Photonic Technologies (rok: 2014, ), Wydawca: University of Žilina
    Data:
    konferencja June 1-4, 2014
    Status:
    Published
  6. Application of Pd nano-islands for nanostructuring of AlGaN/GaN heterostructures
    Authors:
    Stafiniak Andrzej P, Owczarzak Sławomir, Macherzyński Wojciech
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  7. ANALYSIS OF METAL-SEMICONDUCTOR INTERFACE AT OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURE
    Authors:
    J. Prażmowska, W. Macherzyński, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Zilina
    Data:
    konferencja 1-4.06.2015
    Status:
    Published
  8. Investigation of oxygen plasma etching of diamond-like carbon films
    Authors:
    Kijaszek Wojciech, Prażmowska-Czajka Joanna, Oleszkiewicz Waldemar
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  9. THE INFLUENCE OF ALGAN LAYER ETCHING ON THE PARAMETERS OF TI/AL/MO/AU OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURES
    Authors:
    J. Gryglewicz, W. Macherzyński, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Zilina
    Data:
    konferencja 1-4.06.2015
    Status:
    Published
  10. Different buffer approaches for AlGaN/GaN heterostructures epitaxy on Si(111) substrates
    Authors:
    M. Wosko, B. Paszkiewicz, T. Szymanski, R. Paszkiewicz
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (rok: 2014, ), Wydawca: Institute of Electronics and Photonics, Bratislava
    Data:
    konferencja 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  11. Mushroom - like profile fabrication in Lo/Hi resist system by electron beam lithography
    Authors:
    K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    10th Interregional Workshop between Saxonia, Silesia and Czech "Advanced Nanomaterials - Synthesis, Properties, Characterization" (rok: 2014, ), Wydawca: Wroclaw University of TEchnology
    Data:
    konferencja 13-14 November, 2014
    Status:
    Published
  12. Conductivity model of electrospun ZnO nanofibers
    Authors:
    Stafiniak Andrzej P, Gryglewicz Jacek I, Boratyński Bogusław, Tłaczała Marek
    Conference:
    International Conference on Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Žilina
    Data:
    konferencja June 1-4, 2015
    Status:
    Published
  13. LP MOVPE selective epitaxial growth of InP:Fe on nanplanar substrates
    Authors:
    Kosior Łukasz, Badura Mikołaj, Zborowska-Lindert Iwona, Radziewicz Damian, Stafiniak Andrzej P, Ściana Beata, Tłaczała Marek
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies : proceedings of ADEPT (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  14. Alternative metalization for the Ti/Al/Mo/Au ohmic contact to the AlGaN/GaN heterostructure
    Authors:
    Macherzyński Wojciech, Paszkiewicz Bogdan, Stafiniak Andrzej P, Szymański Tomasz, Paszkiewicz Regina
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  15. Analysis of factors influencing the resolution of gate fabricated by photolitography technique
    Authors:
    J. Prażmowska, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    4th International Conference on Advances in Electronic and Photonic Technologies (rok: 2016, ), Wydawca: University of Žilina
    Data:
    konferencja June 20-23, 2016
    Status:
    Published
  16. ANALYSIS OF METAL-SEMICONDUCTOR INTERFACE AT OHMIC CONTACTS TO ALGAN/GAN HETEROSTRUCTURE
    Authors:
    J. Prażmowska, W. Macherzyński, R. Paszkiewicz
    Conference:
    Advances in Electronic and Photonic Technologies (rok: 2015, ), Wydawca: University of Zilina
    Data:
    konferencja 1-4.06.2015
    Status:
    Published
  17. Optimization of reactive ion etching process of AlGaN/GaN heteterostructures used for electronic devices
    Authors:
    J. Gryglewicz, W. Macherzyński, A. Stafiniak, M. Wośko, B. Paszkiewicz, R. Paszkiewicz, M.Tłaczała
    Conference:
    10th Interregional Workshop between Saxonia, Silesia and Czech "Advanced Nanomaterials - Synthesis, Properties, Characterization" (rok: 2014, ), Wydawca: Wroclaw University of TEchnology
    Data:
    konferencja 13-14 November, 2014
    Status:
    Published
  18. Application of real time in-situ interferometry for the observation of GaN/Si MOVPE growth process
    Authors:
    T. Szymanski, M. Wośko, B. Paszkiewicz, K. Indykiewicz, R. Paszkiewicz
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (rok: 2014, ), Wydawca: Institute of Electronics and Photonics, Bratislava
    Data:
    konferencja 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  19. Precise etching of AlGaN/GaN HEMT structures with Cl2/BCl3/Ar plasma
    Authors:
    J. Gryglewicz, R. Paszkiewicz, W. Macherzyński, A. Stafiniak, M. Wośko
    Conference:
    The 10th International Conference on Advanced Semiconductor Devices and Microsystems (rok: 2014, ), Wydawca: Institute of Electronics and Photonics, Bratislava
    Data:
    konferencja 20-22 October 2014
    Status:
    Published
    DOI:
    link to the publication
  20. Influence of V/III ratio during MOVPE GaN buffer growth on the properties of AlGaN/GaN/SiN/AlN/Si(111) structures for HEMT purposes
    Authors:
    Szymański Tomasz, Wośko Mateusz M, Paszkiewicz Bogdan, Serafińczuk Jarosław, Drzik Milan, Paszkiewicz Regina
    Conference:
    16th European Workshop on Metalorganic Vapour Phase Epitaxy (rok: 2015, ), Wydawca: The Nanometer Structure Consortium at Lund University
    Data:
    konferencja June 7-10, 2015
    Status:
    Published
  21. Improvement of AlGaN/GaN heterostructures electrical performance by altering GaN/sapphire buffers growth pressure.
    Authors:
    Wośko Mateusz M , Paszkiewicz Bogdan , Szymański Tomasz , Paszkiewicz Regina
    Conference:
    16th European Workshop on Metalorganic Vapour Phase Epitaxy (rok: 2015, ), Wydawca: The Nanometer Structure Consortium at Lund University
    Data:
    konferencja June 7-10, 2015
    Status:
    Published
  22. Optimization of reactive ion etching process of AlGaN/GaN heteterostructures used for electronic devices
    Authors:
    J. Gryglewicz, W. Macherzyński, A. Stafiniak, M. Wośko, B. Paszkiewicz, R. Paszkiewicz, M.Tłaczała
    Conference:
    10th Interregional Workshop between Saxonia, Silesia and Czech "Advanced Nanomaterials - Synthesis, Properties, Characterization" (rok: 2014, ), Wydawca: Wroclaw University of TEchnology
    Data:
    konferencja 13-14 November, 2014
    Status:
    Published
  1. Wykorzystanie profilometru optycznego w celu badania naprężeń występujących w heterostrukturach AlGaN/GaN osadzanych metodą MOVPE na podłożach krzemowych do zastosowań w tranzystorach typu HEMT
    Authors:
    Szymański Tomasz, Szyszka Adam, Wośko Mateusz M
    Book:
    Badani i Rozwój Młodych Naukowców w Polsce - Polimery i kompozyty (rok: 2015, tom: I, strony: 92-97), Wydawca: Młodzi Naukowcy 2015
    Status:
    Published
  2. Methods of Characterization - Characterization of diamond-like carbon films deposited by RF ICP PECVD method - investigation of technologica process parameters influence on properties of deposited DLC films
    Authors:
    W. Oleszkiewicz, W. Kijaszek, J. Kovac Jr, J. Kovac, A. Zakrzewski, S. Patela, M. Tlaczala
    Book:
    Vacuum Technique & Technology (rok: 2014, tom: 1, strony: 123-136), Wydawca: Tele & Radio Research Institute
    Status:
    Published
  3. Materials - Microstructure of the Ti/Al ohmic contacts to the AlGaN/GaN heterostructure
    Authors:
    W. Macherzyński, B. Paszkiewicz, A. Stafiniak, M. Wośko
    Book:
    Vacuum Technique & Technology (rok: 2014, tom: 1, strony: 93-99), Wydawca: Tele & Radio Research Institute, Warsaw
    Status:
    Published
  4. Wpływ parametrów technologicznych na rozdzielczość struktur testowych Ti/Au wytwarzanych w procesie litografii elektronowej
    Authors:
    Indykiewicz Kornelia
    Book:
    Badani i Rozwój Młodych Naukowców w Polsce - Nauki techniczne i inyżynieryjne (rok: 2015, tom: I, strony: 59-63), Wydawca: Młodzi Naukowcy
    Status:
    Published

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