Projects funded by the NCN

Information on the principal investigator and host institution

Information of the project and the call

Keywords

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The influence of piezotronic effects on the operation of the electronic devices fabricated in AIIIN nanostructures

2015/19/B/ST7/02494

Keywords:

piezotronic AIIIN nanostructures elektronic devices static and dynamic stress states

Descriptors:

  • ST7_5: Micro- and nanelectronic, optoelectronic and photonic components
  • ST7_2: Electrical engineering: power components and/or systems
  • ST7_6: Communication technology, high-frequency technology

Panel:

ST7 - Systems and communication engineering: electronics, communication, optoelectronics

Host institution :

Politechnika Wrocławska, Wydział Elektroniki Mikrosystemów i Fotoniki

woj. dolnośląskie

Other projects carried out by the institution 

Principal investigator (from the host institution):

prof. Regina Paszkiewicz 

Number of co-investigators in the project: 9

Call: OPUS 10 - announced on 2015-09-15

Amount awarded: 1 435 400 PLN

Project start date (Y-m-d): 2016-07-06

Project end date (Y-m-d): 2020-01-05

Project duration:: 42 months (the same as in the proposal)

Project status: Project settled

Project description

Download the project description in a pdf file

Note - project descriptions were prepared by the authors of the applications themselves and placed in the system in an unchanged form.

Equipment purchased [PL]

  1. System do pomiarów efektu Halla: Lake Shore 8400 series HMS (399 996 PLN)
  2. Licencja na pakiet oprogramowania firmy National Instrument: NI LabVIEW Academic Premium Suite" (20 000 PLN)
  3. Licencja sieciowa na oprogramowanie do symulacji COMSOL Multiphysics (65 000 PLN)

Information in the final report

  • Publication in academic press/journals (22)
  • Articles in post-conference publications (30)
  • Book publications / chapters in book publications (2)
  1. Pomiary in-situ jednorodności temperatury i ex-situ grubości osadzonej warstwy w systemie epitaksjalnym AIXTRON CCS 3x2''
    Authors:
    Piotr Pokryszka, Mateusz M. Wośko, Regina Paszkiewicz
    Academic press:
    Przegląd Elektrotechniczny (rok: 2019, tom: R. 95, nr 10, strony: 173-176), Wydawca: Sigma-Not
    Status:
    Published
    DOI:
    10.40 - link to the publication
  2. Proximity effect in gate fabrication using photolithography technique
    Authors:
    J. Prażmowska-Czajka, K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz,
    Academic press:
    Advances in Electrical and Electronic Engineering (rok: 2017, tom: 15, strony: 358-364), Wydawca: VSB-Technical University of Ostrava
    Status:
    Published
    DOI:
    10.15598/aeee.v15i2.2024 - link to the publication
  3. Zintegrowany układ oświetlenia próbki do mikroskopu ze skanującą sondą
    Authors:
    A. Szyszka, R. Paszkiewicz, T. Szymański, M. Tłaczała
    Academic press:
    Przegląd Elektrotechniczny (rok: 2018, tom: R. 94, nr 8,, strony: 21-24), Wydawca: Sigma Not
    Status:
    Published
    DOI:
    10.15199/48.2018.08.06 - link to the publication
  4. Metalorganic vapour-phase epitaxy of AlGaN/GaN heterostructures on chlorine plasma etched GaN templates without buried conductive layer
    Authors:
    Mateusz M. Wośko, Bogdan Paszkiewicz, Andrzej P. Stafiniak, Joanna Prażmowska-Czajka, Andrej Vincze, Kornelia Indykiewicz, Michał Stępniak, Bartosz Kaczmarczyk, Regina Paszkiewicz
    Academic press:
    Materials Science in Semiconductor Processing (rok: 2020, tom: 107, strony: 1-6,), Wydawca: Elsevier Ltd
    Status:
    Published
    DOI:
    10.1016/j.mssp.2019.104816 - link to the publication
  5. Nanostructuring of Si substrates by a metal-assisted chemical etching and dewetting process
    Authors:
    A. P. Stafiniak, J. Prażmowska-Czajka, W. Macherzyński, R. Paszkiewicz
    Academic press:
    RSC Advances (rok: 2018, tom: vol. 8, nr 54,, strony: 31224-31230), Wydawca: Royal Society of Chemistry
    Status:
    Published
    DOI:
    10.1039/c8ra03711f - link to the publication
  6. Wybrane aspekty wytwarzania masek fotolitograficznych na podłożach szafirowych.
    Authors:
    Agnieszka Zawadzka, Joanna Prażmowska-Czajka, Kornelia Indykiewicz, Regina Paszkiewicz
    Academic press:
    Przegląd Elektrotechniczny. (rok: 2019, tom: R. 95, nr 10, strony: 162-165), Wydawca: Sigma-Not
    Status:
    Published
    DOI:
    10.37 - link to the publication
  7. Photolithographic mask fabrication process using Cr/sapphire carriers,
    Authors:
    Agnieszka Zawadzka, Joanna Prażmowska, Regina Paszkiewicz,
    Academic press:
    Advances in Electrical and Electronic Engineering (rok: 2019, tom: vol. 17, nr 3, strony: s. 374-378), Wydawca: VSB-Technical University of Ostrava
    Status:
    Published
    DOI:
    10.15598/aeee.v17i3.3357 - link to the publication
  8. Surface electrical characterization of defect related inhomogeneities of AlGaN/GaN/Si heterostructures using scanning capacitance microscopy
    Authors:
    Adam Szyszka, Mateusz M. Wośko, Bogdan Paszkiewicz, Regina Paszkiewicz,
    Academic press:
    Materials Science in Semiconductor Processing. (rok: 2019, tom: 94, strony: 57-63), Wydawca: Elsevier Ltd.
    Status:
    Published
    DOI:
    10.1016/j.mssp.2019.01.043 - link to the publication
  9. Exposition time analysis of AlGaN/GaN HEMT fabrication by electron beam lithography
    Authors:
    Kornelia Indykiewicz, Bogdan Paszkiewicz, Regina Paszkiewicz,
    Academic press:
    Optica Applicata (rok: 2019, tom: vol. 49, nr 1, strony: 161-166), Wydawca: Wrocław University of Science and Technology
    Status:
    Published
    DOI:
    10.5277/oa190114, - link to the publication
  10. MOVPE growth conditions optimization for AlGaN/GaN/Si heterostructures with SiN and LT-AlN interlayers designed for HEMT applications
    Authors:
    4.Mateu Mateusz Wośko, Tomasz Szymański, Bogdan Paszkiewicz, Piotr Pokryszka, Regina Paszkiewicz,
    Academic press:
    Journal of Materials Science. Materials in Electronics (rok: 2019, tom: 30, strony: 4111–4116), Wydawca: Springer Science+Business Media
    Status:
    Published
    DOI:
    10.1007/s10854-019-00702-9 - link to the publication
  11. Two-stage reactive ion etching of AlGaN/GaN high electron mobility transistor type heterostructures
    Authors:
    Sławomir Owczarzak, Andrzej P. Stafiniak, Regina Paszkiewicz
    Academic press:
    Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics. (rok: 2019, tom: vol. 37, nr 1,, strony: 45297), Wydawca: American Institute of Physics
    Status:
    Published
    DOI:
    10.1116/1.5064778 - link to the publication
  12. Self-organization of palladium nanoislands on GaN and AlxGa1−xN/GaN heterostructures
    Authors:
    A. Stafiniak, T. Szymański, R. Paszkiewicz
    Academic press:
    Applied Surface Science (rok: 2017, tom: 426,, strony: 123-132,), Wydawca: Elsevier
    Status:
    Published
    DOI:
    10.1016/j.apsusc.2017.07.213 - link to the publication
  13. Substrate effect in electron beam litography
    Authors:
    K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz
    Academic press:
    Advances in Electrical and Electronic Engineering (rok: 2018, tom: vol. 16, nr 2, strony: 246-252), Wydawca: VSB-Technical University of Ostrava
    Status:
    Published
    DOI:
    10.15598/aeee.v16i2.2756 - link to the publication
  14. Synthesis and characterization of Ga2O3 and In2O3 nanowires
    Authors:
    Andrzej P. Stafiniak, Joanna Prażmowska-Czajka, Ryszard Korbutowicz, Jarosław Serafińczuk, Regina Paszkiewicz
    Academic press:
    Advances in Electrical and Electronic Engineering (rok: 2019, tom: vol. 17, nr 2, strony: 229-233,), Wydawca: VSB-Technical University of Ostrava
    Status:
    Published
    DOI:
    10.15598/aeee.v17i2.3356 - link to the publication
  15. Comparison of electrical, optical and structural properties of epitaxially grown HEMT's type AlGaN/AlN/GaN heterostructures on Al2O3, Si and SiC substrates
    Authors:
    M. Wośko, B. Paszkiewicz, T. Szymański, R. Paszkiewicz,
    Academic press:
    Superlattices and Microstructures (rok: 2016, tom: 100, strony: 619-626), Wydawca: Elsevier
    Status:
    Published
    DOI:
    10.017 - link to the publication
  16. Badanie elektrycznych właściwości powierzchni heterostruktur AlGaN/GaN/Si technikami mikroskopii ze skanującą sondą i oświetleniem
    Authors:
    Adam Szyszka, Mateusz M. Wośko, Regina Paszkiewicz
    Academic press:
    Przegląd Elektrotechniczny (rok: 2019, tom: R. 95, nr 9, strony: 157-160), Wydawca: SIGMA-NOT
    Status:
    Published
    DOI:
    10.15199/48.2019.09.33 - link to the publication
  17. Badanie elektrycznych właściwości powierzchni heterostruktur AlGaN/GaN/Si techniką skaningowej mikroskopii pojemnościowej
    Authors:
    A. Szyszka, T. Szymański, M. Tłaczała, M. Wośko, R. Paszkiewicz,
    Academic press:
    Przegląd Elektrotechniczny (rok: 2017, tom: R. 93, nr 8, strony: 58-60), Wydawca: Sigma-NOT
    Status:
    Published
    DOI:
    10.15199/48.2017.08.15 - link to the publication
  18. Light influence on the sheet resistance of AlGaN/GaN heterostructures grown by MOVPE technique
    Authors:
    P. Pokryszka, T. Szymański, B. Paszkiewicz
    Academic press:
    Crystal Research and Technology (rok: 2018, tom: vol. 53, nr 11, strony: 45295), Wydawca: WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
    Status:
    Published
    DOI:
    10.1002/crat.201800157 - link to the publication
  19. Optimization of LT-GaN nucleation layer growth conditions for the improvement of electrical and optical parameters of GaN layers
    Authors:
    M. Wośko
    Academic press:
    Optica Applicata (rok: 2019, tom: vol. 49, nr 1, strony: 167-176), Wydawca: Wroclaw University of Science and Technology
    Status:
    Published
    DOI:
    10.5277/oa190115 - link to the publication
  20. Origin of surface defects and influence of an in situ deposited SiN nanomask on the properties of strained AlGaN/GaN heterostructures grown on Si(111) using metal-organic vapour phase epitaxy,
    Authors:
    T. Szymański, M. Wośko, M. Wzorek, B. Paszkiewicz, R. Paszkiewicz
    Academic press:
    CrystEngComm (rok: 2016, tom: 18, strony: 8747-8755), Wydawca: Royal Society of Chemistry
    Status:
    Published
    DOI:
    10.1039/C6CE01804A - link to the publication
  21. Pogrubiania elektrochemiczne złotem cienkich warstw metalicznych.
    Authors:
    Wojciech Macherzyński, Piotr Buba, Piotr Pokryszka, Grzegorz R. Ilgiewicz, Regina Paszkiewicz
    Academic press:
    Przegląd Elektrotechniczny (rok: 2019, tom: R. 95, nr 10, strony: 146-149), Wydawca: Sigma-Not
    Status:
    Published
    DOI:
    10.33 - link to the publication
  22. Stress and induced electric polarization modeling in polar, semi-polar, and non-polar AlGaN/GaN heterostructures for piezotronics application
    Authors:
    B. K. Paszkiewicz
    Academic press:
    Advanced Engineering Materials (rok: 2017, tom: 19, strony: 45299), Wydawca: WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
    Status:
    Published
    DOI:
    10.1002/adem.201600712 - link to the publication
  1. Limitation of deep structures formation during RIE process
    Authors:
    Sławomir Owczarzak, Andrzej P. Stafiniak, Wojciech Macherzyński, Joanna Prażmowska, Regina Paszkiewicz
    Conference:
    7th International Conference on Advances in Electronic and Photonic Technologies, ADEPT 2019 (rok: 2019, ), Wydawca: University of Žilina in EDIS-Publishing Centre of UZ
    Data:
    konferencja June 24-27, 2019
    Status:
    Published
  2. The effect of the second conducting channel in AlGaN/GaN type HEMT heterostructures on the Hall measurements
    Authors:
    M. Glinkowski, B. Paszkiewicz, R. Paszkiewicz,
    Conference:
    7th International Conference on Advances in Electronic and Photonic Technologies, ADEPT 2019 (rok: 2019, ), Wydawca: University of Žilina in EDIS-Publishing Centre of UZ
    Data:
    konferencja June 24-27, 2019
    Status:
    Published
  3. Advanced analysis of AlGaN/GaN/Si heterostructures topography
    Authors:
    A. Szyszka, T. Szymański, M. Wośko, R. Paszkiewicz
    Conference:
    5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (rok: 2017, ), Wydawca: University of Žilina
    Data:
    konferencja 19-22.06.2017
    Status:
    Published
  4. Alloyed ohmic contacts compositions to AlGaN/GaN heterostructures without Al
    Authors:
    G. Ilgiewicz, W. Macherzyński, R. Paszkiewicz
    Conference:
    2017 International Students and Young Scientists Workshop (rok: 2018, ), Wydawca: Wydawnictwo Gmork
    Data:
    konferencja 8-10 September 2017
    Status:
    Published
  5. Nanostructuring of Si substrates by metal-assisted chemical etching and solid-state dewetting process
    Authors:
    A. Stafiniak, J. Prażmowska-Czajka, W. Macherzyński, R. Paszkiewicz,
    Conference:
    5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (rok: 2017, ), Wydawca: University of Źilina
    Data:
    konferencja 19-22.06.2017
    Status:
    Published
  6. Point spread function (PSF) evaluation in the calculation of the substrate effect in EBL process
    Authors:
    K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz,
    Conference:
    5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (rok: 2017, ), Wydawca: University of Źilina
    Data:
    konferencja 19-22.06.2017
    Status:
    Published
  7. Synthesis of GaN nanowires at atmospheric pressure
    Authors:
    Joanna Prażmowska, Andrzej P. Stafiniak, Ryszard Korbutowicz, M. Soulier, Jarosław Serafińczuk, Regina Paszkiewicz,
    Conference:
    7th International Conference on Advances in Electronic and Photonic Technologies, ADEPT 2019 (rok: 2019, ), Wydawca: University of Žilina in EDIS-Publishing Centre of UZ
    Data:
    konferencja June 24-27, 2019
    Status:
    Published
  8. ACOUSTIC TRANSDUCER FABRICATED IN ALGAN/GAN HETEROSTRUCTURE FOR PIEZOTRONICS APPLICATIONS
    Authors:
    B.K. Paszkiewicz1, B.Paszkiewicz1, A. Dziedzic1
    Conference:
    6th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (rok: 2018, ), Wydawca: Bratislava : Institute of Electronics and Photonics, FEI STU
    Data:
    konferencja June 18-21, 2018
    Status:
    Published
  9. Zirconium based ohmic contact to the AlGaN/GaN heterostructures
    Authors:
    W. Macherzyński, G. Ilgiewicz, B. Paszkiewicz, R. Paszkiewicz,
    Conference:
    5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (rok: 2017, ), Wydawca: University of Źilina
    Data:
    konferencja 19-22.06.2017
    Status:
    Published
  10. Factors influencing acoustic waves generation and propagation in AlGaN/GaN heterostructures
    Authors:
    B. K. Paszkiewicz, A. Dziedzic,
    Conference:
    5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (rok: 2017, ), Wydawca: University of Žilina
    Data:
    konferencja 19-22.06.2017
    Status:
    Published
  11. Study of the etched pattern geometry change during RIE of nitrides
    Authors:
    S. Owczarzak, A. Stafiniak, R. Paszkiewicz,
    Conference:
    2018 International Students and Young Scientists Workshop, Optoelectronics and Microsystems Packaging (rok: 2019, ), Wydawca: Gmork
    Data:
    konferencja 22-24 November 2018
    Status:
    Published
  12. Application of anisotropic etching of Si(11x) for deposition of c-axis inclined MOVPE GaN structures
    Authors:
    T. Szymański, M. Wośko, I. Zubel, B. Paszkiewicz, R. Paszkiewicz,
    Conference:
    7th European Workshop on Metalorganic Vapour Phase Epitaxy, EWMOVPE XVII (rok: 2017, ), Wydawca: CEA de la recherche a l'industrie
    Data:
    konferencja 18-21.06.2018
    Status:
    Published
  13. Application of deep reactive ion etching for nanostructurisation of GaN structures
    Authors:
    S. Owczarzak, A. P. Stafiniak, R. Paszkiewicz
    Conference:
    2017 International Students and Young Scientists Workshop,, Szklarska Poręba, Poland, Wydawnictwo , 2018, s. (rok: 2018, ), Wydawca: Wydawnictwo Gmork
    Data:
    konferencja 8-10 September 2017
    Status:
    Published
  14. Elaboration of oxides nanowires device processes
    Authors:
    Prażmowska-Czajka Joanna, Stafiniak Andrzej P, Korbutowicz Ryszard, Paszkiewicz Regina
    Conference:
    6th International Conference on Advances in Electronic and Photonic Technologies (rok: 2018, ), Wydawca: Bratislava : Institute of Electronics and Photonics, FEI STU
    Data:
    konferencja June 18-21, 2018
    Status:
    Published
  15. Mask modification for ISWA control after RIE process dedicated for piezotronic device fabrication
    Authors:
    Owczarzak Sławomir, Stafiniak Andrzej P, Paszkiewicz Regina
    Conference:
    6th International Conference on Advances in Electronic and Photonic Technologies (rok: 2018, ), Wydawca: Bratislava : Institute of Electronics and Photonics, FEI STU
    Data:
    konferencja June 18-21, 2018
    Status:
    Published
  16. Rocking puddle development for microelectronic structures fabrication
    Authors:
    J. Prażmowska-Czajka, A. Kosmała, R. Paszkiewicz
    Conference:
    5th International Conference on Advances in Electronic and Photonic Technologies (rok: 2017, ), Wydawca: University of Źilina
    Data:
    konferencja 19-22.06.2017
    Status:
    Published
  17. Synthesis and characterization of AIII-oxide nanowires
    Authors:
    Stafiniak Andrzej P, Prażmowska-Czajka Joanna, Korbutowicz Ryszard, Macherzyński Wojciech, Serafińczuk Jarosław, Janicki Łukasz K, Paszkiewicz Regina
    Conference:
    6th International Conference on Advances in Electronic and Photonic Technologies (rok: 2018, ), Wydawca: Bratislava : Institute of Electronics and Photonics, FEI STU
    Data:
    konferencja June 18-21, 2018
    Status:
    Published
  18. Application of deep RIE technology for piezotronic device fabrication
    Authors:
    S. Owczarzak, A. Stafiniak, R. Paszkiewicz
    Conference:
    5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (rok: 2017, ), Wydawca: University of Źilina
    Data:
    konferencja 19-22.06.2017
    Status:
    Published
  19. Effect of addition of niobium layer to Ti/Al based ohmic contact to AlGaN/GaN heterostructures
    Authors:
    G. Ilgiewicz, W. Macherzyński, R. Paszkiewicz
    Conference:
    5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (rok: 2017, ), Wydawca: Univesity of Źilina
    Data:
    konferencja 19-22.06.2017
    Status:
    Published
  20. AlN/GaN superlattices for enhancement of epitaxially grown AlGaN/GaN/Si(111) HEMT's structures performance
    Authors:
    M. Wośko, T. Szymański, B. Paszkiewicz, R. Paszkiewicz
    Conference:
    41st Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDICE 2017 (rok: 2017, ), Wydawca: University of Las Palmas de Gran Canaria (ULPGC)
    Data:
    konferencja 22-24.05.2017
    Status:
    Published
  21. Application of non-contact sheet resistance measurement for MOVPE AlGaN/GaN HEMT structures uniformity
    Authors:
    B. Paszkiewicz, B. K. Paszkiewicz, M. Wośko, P. Pokryszka, T. Szymański, R. Paszkiewicz,
    Conference:
    7th European Workshop on Metalorganic Vapour Phase Epitaxy, EWMOVPE XVII (rok: 2017, ), Wydawca: CEA de la recherche a l'industrie
    Data:
    konferencja 18-21.06.2017
    Status:
    Published
  22. Chrome mask fabrication on Al2O3 substrate for new generation devices based on AlGaN/GaN heterostructure
    Authors:
    Kornelia Indykiewicz, Bartłomiej Paszkiewicz, Agnieszka Zawadzka, Regina Paszkiewicz
    Conference:
    35th European Mask and Lithography Conference, EMLC 2019 (rok: 2019, ), Wydawca: SPIE
    Data:
    konferencja 17–19 June, 2019
    Status:
    Published
  23. Elaboration of Cr/sapphire photolithographic mask fabrication process
    Authors:
    Kosmała Agnieszka, Prażmowska-Czajka Joanna, Paszkiewicz Regina
    Conference:
    6th International Conference on Advances in Electronic and Photonic Technologies (rok: 2018, ), Wydawca: Bratislava : Institute of Electronics and Photonics, FEI STU
    Data:
    konferencja June 18-21, 2018
    Status:
    Published
  24. Puddle development for microelectronic devices fabrication,
    Authors:
    A. Kosmała Agnieszka, J. Prażmowska-Czajka, R. Paszkiewicz,
    Conference:
    2016 International Students and Young Scientists Workshop (rok: 2017, ), Wydawca: Wydawnictwo Gmork
    Data:
    konferencja 28-30.10.2016
    Status:
    Published
  25. Wolfram as alternative for gold in fabrication of ohmic alloyed contacts to AlGaN/GaN heterostructures
    Authors:
    Ilgiewicz Grzegorz R, Macherzyński Wojciech, Paszkiewicz Regina
    Conference:
    6th International Conference on Advances in Electronic and Photonic Technologies (rok: 2018, ), Wydawca: Bratislava : Institute of Electronics and Photonics, FEI STU
    Data:
    konferencja June 18-21, 2018
    Status:
    Published
  26. Brief introduction to Hall effect and scattering theory
    Authors:
    M. Glinkowski, B. Paszkiewicz
    Conference:
    2016 International Students and Young Scientists Workshop (rok: 2017, ), Wydawca: Wydawnictwo Gmork
    Data:
    konferencja 28-30.10.2016
    Status:
    Published
  27. Measurement of AlGaN/GaN HEMT
    Authors:
    P. Pokryszka, B. Paszkiewicz,
    Conference:
    2016 International Students and Young Scientists Workshop (rok: 2017, ), Wydawca: Wydawnictwo Gmork
    Data:
    konferencja 28-30.10.2016
    Status:
    Published
  28. Algorithm of selecting the most probable scattering mechanism in AlGaN/GaN type HEMT heterostructures
    Authors:
    M. Glinkowski, B. Paszkiewicz
    Conference:
    2017 International Students and Young Scientists Workshop (rok: 2018, ), Wydawca: Wydawnictwo Gmork
    Data:
    konferencja 8-10 September 2017
    Status:
    Published
  29. Correlation between scattering mechanism of electrons and the properties of AlGaN/GaN HEMT type heterostructures
    Authors:
    Glinkowski Mateusz, Paszkiewicz Bogdan, Paszkiewicz Regina
    Conference:
    6th International Conference on Advances in Electronic and Photonic Technologies (rok: 2018, ), Wydawca: Bratislava : Institute of Electronics and Photonics, FEI STU
    Data:
    konferencja June 18-21, 2018
    Status:
    Published
  30. Study of RIE process for nanostructurisation of AlGaN/GaN heterostructures
    Authors:
    S. Owczarzak, A. Stafiniak
    Conference:
    2016 International Students and Young Scientists Workshop : (rok: 2017, ), Wydawca: Wydawnictwo Gmork
    Data:
    konferencja 28-30.10.2016
    Status:
    Published
  1. Alloyed ohmic contact to AlGaN/GaN heterostructures: comparison of Nb/Ti/Al/Mo/Au, Ti/Al/Mo/Au and Nb/Al/Mo/Au metallization schemes
    Authors:
    Grzegorz R. Ilgiewicz, Wojciech Macherzyński, Regina Paszkiewicz
    Book:
    Vacuum technique & technology (rok: 2017, tom: (Monographs, strony: 76-82), Wydawca: Tele & Radio Research Institute, Warszawa
    Status:
    Published
  2. The influence of encapsulation by dielectric layer on the morphology of ohmic contacts to AlGaN/GaN heterostructures
    Authors:
    Wojciech Macherzyński, Grzegorz R. Ilgiewicz, Andrzej P. Stafiniak, Bogdan Paszkiewicz, Regina Paszkiewicz
    Book:
    Vacuum technique & technology (rok: 2017, tom: Monographs, strony: 76-82), Wydawca: Tele & Radio Research Institute, Warszawa
    Status:
    Published

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