2012/06/A/ST7/00398
Keywords:
high dielectric constant oxides highly conductive oxides atomic layer deposition ALD
Descriptors:
Panel:
ST7 - Systems and communication engineering: electronics, communication, optoelectronics
Host institution :
Instytut Fizyki PAN
woj. mazowieckie
Principal investigator (from the host institution):
Number of co-investigators in the project: 18
Call: MAESTRO 3 - announced on 2012-06-15
Amount awarded: 2 808 300 PLN
Project start date (Y-m-d): 2013-06-03
Project end date (Y-m-d): 2018-08-02
Project duration:: 62 months (the same as in the proposal)
Project status: Project settled