Projects funded by the NCN
Fabrication and investigations of piezoresistive NEMS devices with FIB/SEM technologies
2016/23/N/ST7/01591
Keywords:
FIB NEMS implantation silicon wet etching
Descriptors:
- ST7_2: Electrical engineering: power components and/or systems
- ST7_5: Micro- and nanelectronic, optoelectronic and photonic components
Panel:
ST7 - Systems and communication engineering: electronics, communication, optoelectronics
Host institution :
Politechnika Wrocławska
woj. dolnośląskie
Principal investigator (from the host institution):
Number of co-investigators in the project: 2
Call: PRELUDIUM 12 - announced on 2016-09-15
Amount awarded: 147 960 PLN
Project start date (Y-m-d): 2017-10-09
Project end date (Y-m-d): 2020-10-08
Project duration:: 36 months (the same as in the proposal)
Project status: Project settled
Project description
Download the project description in a pdf file
Note - project descriptions were prepared by the authors of the applications themselves and placed in the system in an unchanged form.
Equipment purchased [PL]
- Generator wysokich częstosliwości (30 000 PLN)
Information in the final report
- Publication in academic press/journals (2)
- Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam ProcessingAuthors:Piotr Kunicki, Tihomir Angelo, Tzvetan Ivanov, Teodor Gotszalk, Ivo RangelowAcademic press:Sensors (rok: 2019, tom: 0,805555555555555, strony: 4429), Wydawca: MDPIStatus:PublishedDOI:10.3390/s19204429 - link to the publication
- Quartz tuning fork mass change sensing for FIB/SEM technologyAuthors:Piotr Kunicki, Magdalena Moczała-Dusanowska, Grzegorz Jóźwiak, Paulina Szymanowska, Tomasz Piasecki, Teodor GotszalkAcademic press:Micron (rok: 2020, tom: 129, strony: 102792), Wydawca: ElsevierStatus:PublishedDOI:10.1016/j.micron.2019.102792 - link to the publication