Projects search

MOVPE growth conditions optimization for AlGaN/GaN/Si heterostructures with SiN and LT-AlN interlayers designed for HEMT applications

Authors:

4.Mateu Mateusz Wośko, Tomasz Szymański, Bogdan Paszkiewicz, Piotr Pokryszka, Regina Paszkiewicz,

Academic press:

Journal of Materials Science. Materials in Electronics (year: 2019, volume: 30, pages: 4111–4116), Publisher: Springer Science+Business Media

Status:

Published

DOI:

10.1007/s10854-019-00702-9 – link to the publication

Surface electrical characterization of defect related inhomogeneities of AlGaN/GaN/Si heterostructures using scanning capacitance microscopy

Authors:

Adam Szyszka, Mateusz M. Wośko, Bogdan Paszkiewicz, Regina Paszkiewicz,

Academic press:

Materials Science in Semiconductor Processing. (year: 2019, volume: 94, pages: 57-63), Publisher: Elsevier Ltd.

Status:

Published

DOI:

10.1016/j.mssp.2019.01.043 – link to the publication

Zintegrowany układ oświetlenia próbki do mikroskopu ze skanującą sondą

Authors:

A. Szyszka, R. Paszkiewicz, T. Szymański, M. Tłaczała

Academic press:

Przegląd Elektrotechniczny (year: 2018, volume: R. 94, nr 8,, pages: 21-24), Publisher: Sigma Not

Status:

Published

DOI:

10.15199/48.2018.08.06 – link to the publication

Two-stage reactive ion etching of AlGaN/GaN high electron mobility transistor type heterostructures

Authors:

Sławomir Owczarzak, Andrzej P. Stafiniak, Regina Paszkiewicz

Academic press:

Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics. (year: 2019, volume: vol. 37, nr 1,, pages: 46028), Publisher: American Institute of Physics

Status:

Published

DOI:

10.1116/1.5064778 – link to the publication

Optimization of LT-GaN nucleation layer growth conditions for the improvement of electrical and optical parameters of GaN layers

Authors:

M. Wośko

Academic press:

Optica Applicata (year: 2019, volume: vol. 49, nr 1, pages: 167-176), Publisher: Wroclaw University of Science and Technology

Status:

Published

DOI:

10.5277/oa190115 – link to the publication

Badanie elektrycznych właściwości powierzchni heterostruktur AlGaN/GaN/Si technikami mikroskopii ze skanującą sondą i oświetleniem

Authors:

Adam Szyszka, Mateusz M. Wośko, Regina Paszkiewicz

Academic press:

Przegląd Elektrotechniczny (year: 2019, volume: R. 95, nr 9, pages: 157-160), Publisher: SIGMA-NOT

Status:

Published

DOI:

10.15199/48.2019.09.33 – link to the publication

Metalorganic vapour-phase epitaxy of AlGaN/GaN heterostructures on chlorine plasma etched GaN templates without buried conductive layer

Authors:

Mateusz M. Wośko, Bogdan Paszkiewicz, Andrzej P. Stafiniak, Joanna Prażmowska-Czajka, Andrej Vincze, Kornelia Indykiewicz, Michał Stępniak, Bartosz Kaczmarczyk, Regina Paszkiewicz

Academic press:

Materials Science in Semiconductor Processing (year: 2020, volume: 107, pages: 1-6,), Publisher: Elsevier Ltd

Status:

Published

DOI:

10.1016/j.mssp.2019.104816 – link to the publication

Exposition time analysis of AlGaN/GaN HEMT fabrication by electron beam lithography

Authors:

Kornelia Indykiewicz, Bogdan Paszkiewicz, Regina Paszkiewicz,

Academic press:

Optica Applicata (year: 2019, volume: vol. 49, nr 1, pages: 161-166), Publisher: Wrocław University of Science and Technology

Status:

Published

DOI:

10.5277/oa190114, – link to the publication

Substrate effect in electron beam litography

Authors:

K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz

Academic press:

Advances in Electrical and Electronic Engineering (year: 2018, volume: vol. 16, nr 2, pages: 246-252), Publisher: VSB-Technical University of Ostrava

Status:

Published

DOI:

10.15598/aeee.v16i2.2756 – link to the publication

Stress and induced electric polarization modeling in polar, semi-polar, and non-polar AlGaN/GaN heterostructures for piezotronics application

Authors:

B. K. Paszkiewicz

Academic press:

Advanced Engineering Materials (year: 2017, volume: 19, pages: 46030), Publisher: WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Status:

Published

DOI:

10.1002/adem.201600712 – link to the publication

Badanie elektrycznych właściwości powierzchni heterostruktur AlGaN/GaN/Si techniką skaningowej mikroskopii pojemnościowej

Authors:

A. Szyszka, T. Szymański, M. Tłaczała, M. Wośko, R. Paszkiewicz,

Academic press:

Przegląd Elektrotechniczny (year: 2017, volume: R. 93, nr 8, pages: 58-60), Publisher: Sigma-NOT

Status:

Published

DOI:

10.15199/48.2017.08.15 – link to the publication

Proximity effect in gate fabrication using photolithography technique

Authors:

J. Prażmowska-Czajka, K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz,

Academic press:

Advances in Electrical and Electronic Engineering (year: 2017, volume: 15, pages: 358-364), Publisher: VSB-Technical University of Ostrava

Status:

Published

DOI:

10.15598/aeee.v15i2.2024 – link to the publication

Self-organization of palladium nanoislands on GaN and AlxGa1−xN/GaN heterostructures

Authors:

A. Stafiniak, T. Szymański, R. Paszkiewicz

Academic press:

Applied Surface Science (year: 2017, volume: 426,, pages: 123-132,), Publisher: Elsevier

Status:

Published

DOI:

10.1016/j.apsusc.2017.07.213 – link to the publication

Light influence on the sheet resistance of AlGaN/GaN heterostructures grown by MOVPE technique

Authors:

P. Pokryszka, T. Szymański, B. Paszkiewicz

Academic press:

Crystal Research and Technology (year: 2018, volume: vol. 53, nr 11, pages: 46026), Publisher: WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Status:

Published

DOI:

10.1002/crat.201800157 – link to the publication

Nanostructuring of Si substrates by a metal-assisted chemical etching and dewetting process

Authors:

A. P. Stafiniak, J. Prażmowska-Czajka, W. Macherzyński, R. Paszkiewicz

Academic press:

RSC Advances (year: 2018, volume: vol. 8, nr 54,, pages: 31224-31230), Publisher: Royal Society of Chemistry

Status:

Published

DOI:

10.1039/c8ra03711f – link to the publication

Comparison of electrical, optical and structural properties of epitaxially grown HEMT's type AlGaN/AlN/GaN heterostructures on Al2O3, Si and SiC substrates

Authors:

M. Wośko, B. Paszkiewicz, T. Szymański, R. Paszkiewicz,

Academic press:

Superlattices and Microstructures (year: 2016, volume: 100, pages: 619-626), Publisher: Elsevier

Status:

Published

DOI:

10.1016/j.spmi.2016.10.017 – link to the publication

Origin of surface defects and influence of an in situ deposited SiN nanomask on the properties of strained AlGaN/GaN heterostructures grown on Si(111) using metal-organic vapour phase epitaxy,

Authors:

T. Szymański, M. Wośko, M. Wzorek, B. Paszkiewicz, R. Paszkiewicz

Academic press:

CrystEngComm (year: 2016, volume: 18, pages: 8747-8755), Publisher: Royal Society of Chemistry

Status:

Published

DOI:

10.1039/C6CE01804A – link to the publication

Synthesis and characterization of Ga2O3 and In2O3 nanowires

Authors:

Andrzej P. Stafiniak, Joanna Prażmowska-Czajka, Ryszard Korbutowicz, Jarosław Serafińczuk, Regina Paszkiewicz

Academic press:

Advances in Electrical and Electronic Engineering (year: 2019, volume: vol. 17, nr 2, pages: 229-233,), Publisher: VSB-Technical University of Ostrava

Status:

Published

DOI:

10.15598/aeee.v17i2.3356 – link to the publication

Pomiary in-situ jednorodności temperatury i ex-situ grubości osadzonej warstwy w systemie epitaksjalnym AIXTRON CCS 3x2''

Authors:

Piotr Pokryszka, Mateusz M. Wośko, Regina Paszkiewicz

Academic press:

Przegląd Elektrotechniczny (year: 2019, volume: R. 95, nr 10, pages: 173-176), Publisher: Sigma-Not

Status:

Published

DOI:

10.15199/48.2019.10.40 – link to the publication

Pogrubiania elektrochemiczne złotem cienkich warstw metalicznych.

Authors:

Wojciech Macherzyński, Piotr Buba, Piotr Pokryszka, Grzegorz R. Ilgiewicz, Regina Paszkiewicz

Academic press:

Przegląd Elektrotechniczny (year: 2019, volume: R. 95, nr 10, pages: 146-149), Publisher: Sigma-Not

Status:

Published

DOI:

10.15199/48.2019.10.33 – link to the publication

Photolithographic mask fabrication process using Cr/sapphire carriers,

Authors:

Agnieszka Zawadzka, Joanna Prażmowska, Regina Paszkiewicz,

Academic press:

Advances in Electrical and Electronic Engineering (year: 2019, volume: vol. 17, nr 3, pages: s. 374-378), Publisher: VSB-Technical University of Ostrava

Status:

Published

DOI:

10.15598/aeee.v17i3.3357 – link to the publication

Wybrane aspekty wytwarzania masek fotolitograficznych na podłożach szafirowych.

Authors:

Agnieszka Zawadzka, Joanna Prażmowska-Czajka, Kornelia Indykiewicz, Regina Paszkiewicz

Academic press:

Przegląd Elektrotechniczny. (year: 2019, volume: R. 95, nr 10, pages: 162-165), Publisher: Sigma-Not

Status:

Published

DOI:

10.15199/48.2019.10.37 – link to the publication

Mask modification for ISWA control after RIE process dedicated for piezotronic device fabrication

Authors:

Owczarzak Sławomir, Stafiniak Andrzej P, Paszkiewicz Regina

Conference:

6th International Conference on Advances in Electronic and Photonic Technologies (year: 2018, pages: 65-68), Publisher: Bratislava : Institute of Electronics and Photonics, FEI STU

Date:

conference June 18-21, 2018

Status:

Published

Correlation between scattering mechanism of electrons and the properties of AlGaN/GaN HEMT type heterostructures

Authors:

Glinkowski Mateusz, Paszkiewicz Bogdan, Paszkiewicz Regina

Conference:

6th International Conference on Advances in Electronic and Photonic Technologies (year: 2018, pages: 89-92), Publisher: Bratislava : Institute of Electronics and Photonics, FEI STU

Date:

conference June 18-21, 2018

Status:

Published

Synthesis and characterization of AIII-oxide nanowires

Authors:

Stafiniak Andrzej P, Prażmowska-Czajka Joanna, Korbutowicz Ryszard, Macherzyński Wojciech, Serafińczuk Jarosław, Janicki Łukasz K, Paszkiewicz Regina

Conference:

6th International Conference on Advances in Electronic and Photonic Technologies (year: 2018, pages: 188-191), Publisher: Bratislava : Institute of Electronics and Photonics, FEI STU

Date:

conference June 18-21, 2018

Status:

Published

Study of RIE process for nanostructurisation of AlGaN/GaN heterostructures

Authors:

S. Owczarzak, A. Stafiniak

Conference:

2016 International Students and Young Scientists Workshop : (year: 2017, pages: 65-69), Publisher: Wydawnictwo Gmork

Date:

conference 28-30.10.2016

Status:

Published

Chrome mask fabrication on Al2O3 substrate for new generation devices based on AlGaN/GaN heterostructure

Authors:

Kornelia Indykiewicz, Bartłomiej Paszkiewicz, Agnieszka Zawadzka, Regina Paszkiewicz

Conference:

35th European Mask and Lithography Conference, EMLC 2019 (year: 2019, pages: 46031), Publisher: SPIE

Date:

conference 17–19 June, 2019

Status:

Published

Nanostructuring of Si substrates by metal-assisted chemical etching and solid-state dewetting process

Authors:

A. Stafiniak, J. Prażmowska-Czajka, W. Macherzyński, R. Paszkiewicz,

Conference:

5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (year: 2017, pages: 271-274), Publisher: University of Źilina

Date:

conference 19-22.06.2017

Status:

Published

Rocking puddle development for microelectronic structures fabrication

Authors:

J. Prażmowska-Czajka, A. Kosmała, R. Paszkiewicz

Conference:

5th International Conference on Advances in Electronic and Photonic Technologies (year: 2017, pages: 259-262), Publisher: University of Źilina

Date:

conference 19-22.06.2017

Status:

Published

Puddle development for microelectronic devices fabrication,

Authors:

A. Kosmała Agnieszka, J. Prażmowska-Czajka, R. Paszkiewicz,

Conference:

2016 International Students and Young Scientists Workshop (year: 2017, pages: 60-64), Publisher: Wydawnictwo Gmork

Date:

conference 28-30.10.2016

Status:

Published

Elaboration of Cr/sapphire photolithographic mask fabrication process

Authors:

Kosmała Agnieszka, Prażmowska-Czajka Joanna, Paszkiewicz Regina

Conference:

6th International Conference on Advances in Electronic and Photonic Technologies (year: 2018, pages: 109-112), Publisher: Bratislava : Institute of Electronics and Photonics, FEI STU

Date:

conference June 18-21, 2018

Status:

Published

Wolfram as alternative for gold in fabrication of ohmic alloyed contacts to AlGaN/GaN heterostructures

Authors:

Ilgiewicz Grzegorz R, Macherzyński Wojciech, Paszkiewicz Regina

Conference:

6th International Conference on Advances in Electronic and Photonic Technologies (year: 2018, pages: 81-84), Publisher: Bratislava : Institute of Electronics and Photonics, FEI STU

Date:

conference June 18-21, 2018

Status:

Published

Measurement of AlGaN/GaN HEMT

Authors:

P. Pokryszka, B. Paszkiewicz,

Conference:

2016 International Students and Young Scientists Workshop (year: 2017, pages: 70-74), Publisher: Wydawnictwo Gmork

Date:

conference 28-30.10.2016

Status:

Published

Synthesis of GaN nanowires at atmospheric pressure

Authors:

Joanna Prażmowska, Andrzej P. Stafiniak, Ryszard Korbutowicz, M. Soulier, Jarosław Serafińczuk, Regina Paszkiewicz,

Conference:

7th International Conference on Advances in Electronic and Photonic Technologies, ADEPT 2019 (year: 2019, pages: 203-206), Publisher: University of Žilina in EDIS-Publishing Centre of UZ

Date:

conference June 24-27, 2019

Status:

Published

Application of deep reactive ion etching for nanostructurisation of GaN structures

Authors:

S. Owczarzak, A. P. Stafiniak, R. Paszkiewicz

Conference:

2017 International Students and Young Scientists Workshop,, Szklarska Poręba, Poland, Wydawnictwo , 2018, s. (year: 2018, pages: 66-70), Publisher: Wydawnictwo Gmork

Date:

conference 8-10 September 2017

Status:

Published

Limitation of deep structures formation during RIE process

Authors:

Sławomir Owczarzak, Andrzej P. Stafiniak, Wojciech Macherzyński, Joanna Prażmowska, Regina Paszkiewicz

Conference:

7th International Conference on Advances in Electronic and Photonic Technologies, ADEPT 2019 (year: 2019, pages: 75-77), Publisher: University of Žilina in EDIS-Publishing Centre of UZ

Date:

conference June 24-27, 2019

Status:

Published

The effect of the second conducting channel in AlGaN/GaN type HEMT heterostructures on the Hall measurements

Authors:

M. Glinkowski, B. Paszkiewicz, R. Paszkiewicz,

Conference:

7th International Conference on Advances in Electronic and Photonic Technologies, ADEPT 2019 (year: 2019, pages: 59-62), Publisher: University of Žilina in EDIS-Publishing Centre of UZ

Date:

conference June 24-27, 2019

Status:

Published

Study of the etched pattern geometry change during RIE of nitrides

Authors:

S. Owczarzak, A. Stafiniak, R. Paszkiewicz,

Conference:

2018 International Students and Young Scientists Workshop, Optoelectronics and Microsystems Packaging (year: 2019, pages: 73-76), Publisher: Gmork

Date:

conference 22-24 November 2018

Status:

Published

Elaboration of oxides nanowires device processes

Authors:

Prażmowska-Czajka Joanna, Stafiniak Andrzej P, Korbutowicz Ryszard, Paszkiewicz Regina

Conference:

6th International Conference on Advances in Electronic and Photonic Technologies (year: 2018, pages: 196-199), Publisher: Bratislava : Institute of Electronics and Photonics, FEI STU

Date:

conference June 18-21, 2018

Status:

Published

Brief introduction to Hall effect and scattering theory

Authors:

M. Glinkowski, B. Paszkiewicz

Conference:

2016 International Students and Young Scientists Workshop (year: 2017, pages: 16-19), Publisher: Wydawnictwo Gmork

Date:

conference 28-30.10.2016

Status:

Published

Alloyed ohmic contacts compositions to AlGaN/GaN heterostructures without Al

Authors:

G. Ilgiewicz, W. Macherzyński, R. Paszkiewicz

Conference:

2017 International Students and Young Scientists Workshop (year: 2018, pages: 26-30), Publisher: Wydawnictwo Gmork

Date:

conference 8-10 September 2017

Status:

Published

ACOUSTIC TRANSDUCER FABRICATED IN ALGAN/GAN HETEROSTRUCTURE FOR PIEZOTRONICS APPLICATIONS

Authors:

B.K. Paszkiewicz1, B.Paszkiewicz1, A. Dziedzic1

Conference:

6th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (year: 2018, pages: 97-100), Publisher: Bratislava : Institute of Electronics and Photonics, FEI STU

Date:

conference June 18-21, 2018

Status:

Published

Algorithm of selecting the most probable scattering mechanism in AlGaN/GaN type HEMT heterostructures

Authors:

M. Glinkowski, B. Paszkiewicz

Conference:

2017 International Students and Young Scientists Workshop (year: 2018, pages: 21-25), Publisher: Wydawnictwo Gmork

Date:

conference 8-10 September 2017

Status:

Published

Application of anisotropic etching of Si(11x) for deposition of c-axis inclined MOVPE GaN structures

Authors:

T. Szymański, M. Wośko, I. Zubel, B. Paszkiewicz, R. Paszkiewicz,

Conference:

7th European Workshop on Metalorganic Vapour Phase Epitaxy, EWMOVPE XVII (year: 2017, pages: 101-105), Publisher: CEA de la recherche a l'industrie

Date:

conference 18-21.06.2018

Status:

Published

Application of non-contact sheet resistance measurement for MOVPE AlGaN/GaN HEMT structures uniformity

Authors:

B. Paszkiewicz, B. K. Paszkiewicz, M. Wośko, P. Pokryszka, T. Szymański, R. Paszkiewicz,

Conference:

7th European Workshop on Metalorganic Vapour Phase Epitaxy, EWMOVPE XVII (year: 2017, pages: 101-105), Publisher: CEA de la recherche a l'industrie

Date:

conference 18-21.06.2017

Status:

Published

Advanced analysis of AlGaN/GaN/Si heterostructures topography

Authors:

A. Szyszka, T. Szymański, M. Wośko, R. Paszkiewicz

Conference:

5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (year: 2017, pages: 48-51), Publisher: University of Žilina

Date:

conference 19-22.06.2017

Status:

Published

Factors influencing acoustic waves generation and propagation in AlGaN/GaN heterostructures

Authors:

B. K. Paszkiewicz, A. Dziedzic,

Conference:

5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (year: 2017, pages: 64-67), Publisher: University of Žilina

Date:

conference 19-22.06.2017

Status:

Published

AlN/GaN superlattices for enhancement of epitaxially grown AlGaN/GaN/Si(111) HEMT's structures performance

Authors:

M. Wośko, T. Szymański, B. Paszkiewicz, R. Paszkiewicz

Conference:

41st Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDICE 2017 (year: 2017, pages: 47-48), Publisher: University of Las Palmas de Gran Canaria (ULPGC)

Date:

conference 22-24.05.2017

Status:

Published

Point spread function (PSF) evaluation in the calculation of the substrate effect in EBL process

Authors:

K. Indykiewicz, B. Paszkiewicz, R. Paszkiewicz,

Conference:

5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (year: 2017, pages: 88-91), Publisher: University of Źilina

Date:

conference 19-22.06.2017

Status:

Published

Zirconium based ohmic contact to the AlGaN/GaN heterostructures

Authors:

W. Macherzyński, G. Ilgiewicz, B. Paszkiewicz, R. Paszkiewicz,

Conference:

5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (year: 2017, pages: 251-254), Publisher: University of Źilina

Date:

conference 19-22.06.2017

Status:

Published

Application of deep RIE technology for piezotronic device fabrication

Authors:

S. Owczarzak, A. Stafiniak, R. Paszkiewicz

Conference:

5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (year: 2017, pages: 80-83), Publisher: University of Źilina

Date:

conference 19-22.06.2017

Status:

Published

Effect of addition of niobium layer to Ti/Al based ohmic contact to AlGaN/GaN heterostructures

Authors:

G. Ilgiewicz, W. Macherzyński, R. Paszkiewicz

Conference:

5th International Conference on Advances in Electronic and Photonic Technologies, ADEPT (year: 2017, pages: 60-63), Publisher: Univesity of Źilina

Date:

conference 19-22.06.2017

Status:

Published

The influence of encapsulation by dielectric layer on the morphology of ohmic contacts to AlGaN/GaN heterostructures

Authors:

Wojciech Macherzyński, Grzegorz R. Ilgiewicz, Andrzej P. Stafiniak, Bogdan Paszkiewicz, Regina Paszkiewicz

Book:

Vacuum technique & technology (year: 2017, volume: Monographs, pages: 76-82), Publisher: Tele & Radio Research Institute, Warszawa

Status:

Published

Alloyed ohmic contact to AlGaN/GaN heterostructures: comparison of Nb/Ti/Al/Mo/Au, Ti/Al/Mo/Au and Nb/Al/Mo/Au metallization schemes

Authors:

Grzegorz R. Ilgiewicz, Wojciech Macherzyński, Regina Paszkiewicz

Book:

Vacuum technique & technology (year: 2017, volume: (Monographs, pages: 76-82), Publisher: Tele & Radio Research Institute, Warszawa

Status:

Published